Inventor

STOLLEY TOBIAS

DE8 patents

⚠️ This page may combine multiple inventors who share the name “STOLLEY TOBIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US9534294B2Jan 3, 2017

Cleaning method for thin-film processing applications and apparatus for use therein

APPLIED MATERIALS INC3 citations71

US9873945B2Jan 23, 2018

Common deposition platform, processing station, and method of operation thereof

APPLIED MATERIALS INC1 citations49

US10689760B2Jun 23, 2020

Deposition platform for flexible substrates and method of operation thereof

APPLIED MATERIALS INC0 citations35

APPLIED MATERIALS GMBH & CO KG

2 patents

US7837799B2Nov 23, 2010

Arrangement for transporting a flat substrate in a vacuum chamber

APPLIED MATERIALS GMBH & CO KG6 citations59

US7575662B2Aug 18, 2009

Method for operating a sputter cathode with a target

APPLIED MATERIALS GMBH & CO KG0 citations42

BANGERT STEFAN

1 patent

US8137510B2Mar 20, 2012

Coater with a large-area assembly of rotatable magnetrons

BANGERT STEFAN4 citations56

HANIKA MARKUS

1 patent

US8083911B2Dec 27, 2011

Apparatus for treating a substrate

HANIKA MARKUS2 citations49

HERMANNS UWE

1 patent

US9926627B2Mar 27, 2018

System and methods for processing a substrate

HERMANNS UWE0 citations35