Inventor
TANAKA MOTOHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA MOTOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
7 patentsUSD871608SDec 31, 2019
Gas ring for a plasma processing apparatus
HITACHI HIGH TECH CORP15 citations84
US9496147B2Nov 15, 2016
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP5 citations83
US9960031B2May 1, 2018
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP1 citations62
US10699909B2Jun 30, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP1 citations60
US7955514B2Jun 7, 2011
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US12347656B2Jul 1, 2025
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51
US12014903B2Jun 18, 2024
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations46