Inventor

STAHL HEIKO

DE22 patents

⚠️ This page may combine multiple inventors who share the name “STAHL HEIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STAHL HEIKO

BOSCH GMBH ROBERT

System and method for cryptographic key identification

Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component

Micropump having a pump diaphragm and a polysilicon layer

Method for producing a micromechanical element

Method for producing a micromechanical component

Method for producing at least one first and one second micromirror device

Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes

Micromechanical diaphragm sensor having a double diaphragm

Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component

Method for producing at least one via in a wafer

Micromechanical component having an anodically bonded cap and a manufacturing method

Method for producing a bonding pad for a micromechanical sensor element

Component including two semiconductor elements, which are bonded to one another via a structured bonding layer, and method for manufacturing a component of this type

Polycrystalline material having low mechanical strain; method for producing a polycrystalline material

STAHL HEIKO

Micromechanical acceleration sensor having an open seismic mass

Method for producing a micromechanical component

Sensor element and method for operating a sensor element

Micromechanical component having a bond joint

CAFE TRES CORACOES S A

Beverage machine

CAFE TRES CORACOES S/A

Beverages machine

FISCHER FRANK

Micromechanical component having multiple caverns, and manufacturing method

REINMUTH JOCHEN

Method for producing MEMS structures, and MEMS structure