Inventor
MOROZUMI YUICHIRO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “MOROZUMI YUICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS6313047B2Nov 6, 2001
MOCVD method of tantalum oxide film
TOKYO ELECTRON LTD27 citations92
US9293543B2Mar 22, 2016
Film forming method and film forming apparatus
TOKYO ELECTRON LTD5 citations72
US10133265B2Nov 20, 2018
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations71
US9390912B2Jul 12, 2016
Film forming method
TOKYO ELECTRON LTD2 citations63
US7368384B2May 6, 2008
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD4 citations61
US9405289B2Aug 2, 2016
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations60
US7041546B2May 9, 2006
Film forming method for depositing a plurality of high-k dielectric films
TOKYO ELECTRON LTD5 citations60
US9472394B2Oct 18, 2016
Method of forming silicon oxide film
TOKYO ELECTRON LTD0 citations52
MOROZUMI YUICHIRO
3 patentsUS8735304B2May 27, 2014
Film forming method, film forming apparatus, and storage medium
MOROZUMI YUICHIRO0 citations48
US8642127B2Feb 4, 2014
Method of forming titanium nitride film
MOROZUMI YUICHIRO0 citations47
US8277891B2Oct 2, 2012
Method for suppressing particle generation during semiconductor manufacturing
MOROZUMI YUICHIRO0 citations32