Inventor
DEMARAY RICHARD E
US32 patents
⚠️ This page may combine multiple inventors who share the name “DEMARAY RICHARD E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPRINGWORKS LLC
8 patentsUS7378356B2May 27, 2008
Biased pulse DC reactive sputtering of oxide films
SPRINGWORKS LLC30 citations95
US7838133B2Nov 23, 2010
Deposition of perovskite and other compound ceramic films for dielectric applications
SPRINGWORKS LLC27 citations92
US7544276B2Jun 9, 2009
Biased pulse DC reactive sputtering of oxide films
SPRINGWORKS LLC22 citations92
US7469558B2Dec 30, 2008
As-deposited planar optical waveguides with low scattering loss and methods for their manufacture
SPRINGWORKS LLC34 citations92
US7413998B2Aug 19, 2008
Biased pulse DC reactive sputtering of oxide films
SPRINGWORKS LLC17 citations92
US7381657B2Jun 3, 2008
Biased pulse DC reactive sputtering of oxide films
SPRINGWORKS LLC26 citations92
US8045832B2Oct 25, 2011
Mode size converter for a planar waveguide
SPRINGWORKS LLC17 citations91
US7404877B2Jul 29, 2008
Low temperature zirconia based thermal barrier layer by PVD
SPRINGWORKS LLC12 citations82
APPLIED MATERIALS INC
6 patentsUS5565071AOct 15, 1996
Integrated sputtering target assembly
APPLIED MATERIALS INC126 citations98
US5433835AJul 18, 1995
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC115 citations98
US5487822AJan 30, 1996
Integrated sputtering target assembly
APPLIED MATERIALS INC106 citations97
US6773562B1Aug 10, 2004
Shadow frame for substrate processing
APPLIED MATERIALS INC54 citations96
US5603816AFeb 18, 1997
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC91 citations95
US5595337AJan 21, 1997
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC44 citations95
SYMMORPHIX INC
6 patentsUS7238628B2Jul 3, 2007
Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides
SYMMORPHIX INC59 citations96
US6506289B2Jan 14, 2003
Planar optical devices and methods for their manufacture
SYMMORPHIX INC101 citations96
US6533907B2Mar 18, 2003
Method of producing amorphous silicon for hard mask and waveguide applications
SYMMORPHIX INC91 citations95
US6827826B2Dec 7, 2004
Planar optical devices and methods for their manufacture
SYMMORPHIX INC62 citations94
US7262131B2Aug 28, 2007
Dielectric barrier layer films
SYMMORPHIX INC21 citations92
US7205662B2Apr 17, 2007
Dielectric barrier layer films
SYMMORPHIX INC11 citations83
APPLIED KOMATSU TECHNOLOGY INC
3 patentsUS5518593AMay 21, 1996
Shield configuration for vacuum chamber
APPLIED KOMATSU TECHNOLOGY INC105 citations98
US6199259B1Mar 13, 2001
Autoclave bonding of sputtering target assembly
APPLIED KOMATSU TECHNOLOGY INC76 citations95
US5855744AJan 5, 1999
Non-planar magnet tracking during magnetron sputtering
APPLIED KOMATSU TECHNOLOGY INC132 citations93