Inventor
OKADA ASHLEY M
US17 patents
Patents
17 patentsUS10453721B2Oct 22, 2019
Methods and assemblies for gas flow ratio control
APPLIED MATERIALS INC7 citations82
US12061103B2Aug 13, 2024
Packaging design for a flow sensor and methods of manufacturing thereof
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US10269600B2Apr 23, 2019
Methods and assemblies for gas flow ratio control
APPLIED MATERIALS INC4 citations71
US11169547B2Nov 9, 2021
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC2 citations70
US12553752B2Feb 17, 2026
Packaging for a sensor and methods of manufacturing thereof
APPLIED MATERIALS INC0 citations62
US11835974B2Dec 5, 2023
Pressure regulated flow controller
APPLIED MATERIALS INC0 citations61
US10921827B1Feb 16, 2021
Pressure regulated flow controller
APPLIED MATERIALS INC1 citations61
US12492926B2Dec 9, 2025
Packaging for a sensor and methods of manufacturing thereof
APPLIED MATERIALS INC0 citations60
US12183606B2Dec 31, 2024
Methods and assemblies for gas flow ratio control
APPLIED MATERIALS INC0 citations60
US11923221B2Mar 5, 2024
Methods and assemblies for gas flow ratio control
APPLIED MATERIALS INC0 citations60
US11519773B2Dec 6, 2022
Methods, systems, and apparatus for mass flow verification based on choked flow
APPLIED MATERIALS INC0 citations60
US11462426B2Oct 4, 2022
Methods and assemblies for gas flow ratio control
APPLIED MATERIALS INC0 citations60
US10943803B2Mar 9, 2021
Methods and assemblies for gas flow ratio control
APPLIED MATERIALS INC0 citations60
US10684159B2Jun 16, 2020
Methods, systems, and apparatus for mass flow verification based on choked flow
APPLIED MATERIALS INC1 citations60
US11520358B2Dec 6, 2022
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC0 citations59
US12523380B2Jan 13, 2026
Prevention of contamination of substrates during pressure changes in processing systems
APPLIED MATERIALS INC0 citations54
US11150120B2Oct 19, 2021
Low temperature thermal flow ratio controller
APPLIED MATERIALS INC0 citations50