Inventor · disambiguated record
Andrzei Kaszuba
Also filed as: KASZUBA ANDRZEI
8 granted patents·1,143 citations·filing 2005–2010
90Inventor score
Top patents by PatentIndex Score
8 records- 0198US7566891B2Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectorsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 28, 2009·553 cites·33 claims
- 0297US7692171B2Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectorsKASZUBA ANDRZEI·Filed 2007·Granted Apr 6, 2010·471 cites·26 claims
- 0396US7589336B2Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectorsAPPLIED MATERIALS INC·Filed 2007·Granted Sep 15, 2009·39 cites·23 claims
- 0495US7777198B2Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiationAPPLIED MATERIALS INC·Filed 2007·Granted Aug 17, 2010·29 cites·30 claims
- 0593US8203126B2Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiationROCHA-ALVAREZ JUAN CARLOS·Filed 2010·Granted Jun 19, 2012·26 cites·15 claims
- 0693US7909595B2Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sectionsAPPLIED MATERIALS INC·Filed 2007·Granted Mar 22, 2011·18 cites·7 claims
- 0777US8597011B2Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sectionsKASZUBA ANDRZEI·Filed 2010·Granted Dec 3, 2013·3 cites·18 claims
- 0870US7354288B2Substrate support with clamping electrical connectorAPPLIED MATERIALS INC·Filed 2005·Granted Apr 8, 2008·4 cites·23 claims
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