Inventor
NARA YASUHIKO
JP44 patents
⚠️ This page may combine multiple inventors who share the name “NARA YASUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
21 patentsUS7425704B2Sep 16, 2008
Inspection method and apparatus using an electron beam
HITACHI HIGH TECH CORP14 citations92
US7292327B2Nov 6, 2007
Circuit-pattern inspection apparatus
HITACHI HIGH TECH CORP21 citations92
US7034298B2Apr 25, 2006
Inspection method and apparatus using an electron beam
HITACHI HIGH TECH CORP31 citations92
USD637098SMay 3, 2011
Semiconductor testing machine
HITACHI HIGH TECH CORP10 citations84
US7071468B2Jul 4, 2006
Circuit pattern inspection method and its apparatus
HITACHI HIGH TECH CORP16 citations84
US7875156B2Jan 25, 2011
Probe storage container, prober apparatus, probe arranging method and manufacturing method of probe storage container
HITACHI HIGH TECH CORP7 citations83
US7129727B2Oct 31, 2006
Defect inspecting apparatus
HITACHI HIGH TECH CORP13 citations82
US7223975B2May 29, 2007
Inspection apparatus for circuit pattern
HITACHI HIGH TECH CORP10 citations80
US7532328B2May 12, 2009
Circuit-pattern inspection apparatus
HITACHI HIGH TECH CORP7 citations73
US7663104B2Feb 16, 2010
Specimen inspection equipment and how to make electron beam absorbed current images
HITACHI HIGH TECH CORP6 citations71
US7732791B2Jun 8, 2010
Semiconductor testing method and semiconductor tester
HITACHI HIGH TECH CORP5 citations62
US7989766B2Aug 2, 2011
Sample inspection apparatus
HITACHI HIGH TECH CORP2 citations61
US11709199B2Jul 25, 2023
Evaluation apparatus for semiconductor device
HITACHI HIGH TECH CORP0 citations60
US11391756B2Jul 19, 2022
Probe module and probe
HITACHI HIGH TECH CORP0 citations60
US7700916B2Apr 20, 2010
Logical CAD navigation for device characteristics evaluation system
HITACHI HIGH TECH CORP2 citations60
US12546805B2Feb 10, 2026
Sample inspection apparatus
HITACHI HIGH TECH CORP0 citations56
US12461126B2Nov 4, 2025
Probe device
HITACHI HIGH TECH CORP0 citations54
US10712384B2Jul 14, 2020
Circuit inspection method and sample inspection apparatus
HITACHI HIGH TECH CORP0 citations52
US7855363B2Dec 21, 2010
Inspection method and apparatus using an electron beam
HITACHI HIGH TECH CORP1 citations52
US11977099B2May 7, 2024
Method for manufacturing semiconductor device
HITACHI HIGH TECH CORP0 citations50
US10782340B2Sep 22, 2020
Dynamic response analysis prober device
HITACHI HIGH TECH CORP0 citations39
HITACHI LTD
18 patentsUS6759655B2Jul 6, 2004
Inspection method, apparatus and system for circuit pattern
HITACHI LTD74 citations98
US6919564B2Jul 19, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6567168B2May 20, 2003
Inspection method, apparatus and system for circuit pattern
HITACHI LTD38 citations96
US6493082B2Dec 10, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD35 citations96
US6480279B2Nov 12, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6476913B1Nov 5, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD59 citations96
US6388747B2May 14, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD62 citations96
US7133550B2Nov 7, 2006
Pattern inspection method and apparatus
HITACHI LTD19 citations93
US6975754B2Dec 13, 2005
Circuit pattern inspection method and apparatus
HITACHI LTD19 citations93
US6898305B2May 24, 2005
Circuit pattern inspection method and apparatus
HITACHI LTD40 citations93
US7269280B2Sep 11, 2007
Method and its apparatus for inspecting a pattern
HITACHI LTD22 citations92
US6903821B2Jun 7, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD15 citations92
US7266235B2Sep 4, 2007
Pattern inspection method and apparatus
HITACHI LTD10 citations84
US7957579B2Jun 7, 2011
Pattern inspection method and apparatus
HITACHI LTD5 citations74
US7894658B2Feb 22, 2011
Pattern inspection method and apparatus
HITACHI LTD4 citations74
US7457453B2Nov 25, 2008
Pattern inspection method and apparatus
HITACHI LTD4 citations74
US6504609B2Jan 7, 2003
Inspection method, apparatus and system for circuit pattern
HITACHI LTD7 citations74
US7049587B2May 23, 2006
Apparatus for inspecting a specimen
HITACHI LTD2 citations62