P

Inventor

PAK SAMUEL S

US10 patents
⚠️ This page may combine multiple inventors who share the name “PAK SAMUEL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VEECO ALD INC

5 patents
USD732093SJun 16, 2015

Gas tube assembly

VEECO ALD INC4 citations68
USD732092SJun 16, 2015

Gas injection plate

VEECO ALD INC0 citations47
US9556514B2Jan 31, 2017

Spatial deposition of material using short-distance reciprocating motions

VEECO ALD INC0 citations45
US9435030B2Sep 6, 2016

Radical reactor with inverted orientation

VEECO ALD INC0 citations44
US9546423B2Jan 17, 2017

Cleaning of deposition device by injecting cleaning gas into deposition device

VEECO ALD INC0 citations36

ARCHERS INC

2 patents
US7897525B2Mar 1, 2011

Methods and systems of transferring, docking and processing substrates

ARCHERS INC21 citations89
US8367565B2Feb 5, 2013

Methods and systems of transferring, docking and processing substrates

ARCHERS INC16 citations80

LEI LAWRENCE CHUNG-LAI

1 patent
US8268734B2Sep 18, 2012

Methods and systems of transferring, docking and processing substrates

LEI LAWRENCE CHUNG-LAI7 citations81

ARCUS TECHNOLOGY INC

1 patent
US7628574B2Dec 8, 2009

Apparatus and method for processing substrates using one or more vacuum transfer chamber units

ARCUS TECHNOLOGY INC7 citations71

SYNOS TECHNOLOGY INC

1 patent
US9145608B2Sep 29, 2015

Scanning injector assembly module for processing substrate

SYNOS TECHNOLOGY INC1 citations44