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Gas injection plate

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Assignee: VEECO ALD INCPriority: Mar 19, 2014Filed: Mar 19, 2014Granted: Jun 16, 2015
Est. expiryMar 19, 2034(~7.7 yrs left)· nominal 20-yr term from priority
Inventors:Samuel S. PakSang In LeeDaniel H. LeeHyoseok Daniel Yang
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a gas injection plate, as shown and described.

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