Inventor · disambiguated record
Samuel S. Pak
Also filed as: PAK SAMUEL S
10 granted patents·6 pending applications·56 citations·filing 2007–2016
86Inventor score
Files withVEECO ALD INC10ARCHERS INC2LEI LAWRENCE CHUNG-LAI2ARCUS TECHNOLOGY INC1SYNOS TECHNOLOGY INC1
Top patents by PatentIndex Score
16 records- 0190US7897525B2Methods and systems of transferring, docking and processing substratesARCHERS INC·Filed 2008·Granted Mar 1, 2011·21 cites·62 claims
- 0289US8367565B2Methods and systems of transferring, docking and processing substratesARCHERS INC·Filed 2010·Granted Feb 5, 2013·16 cites·52 claims
- 0384US8268734B2Methods and systems of transferring, docking and processing substratesLEI LAWRENCE CHUNG-LAI·Filed 2011·Granted Sep 18, 2012·7 cites·34 claims
- 0479US7628574B2Apparatus and method for processing substrates using one or more vacuum transfer chamber unitsARCUS TECHNOLOGY INC·Filed 2007·Granted Dec 8, 2009·7 cites·11 claims
- 0569US9145608B2Scanning injector assembly module for processing substrateSYNOS TECHNOLOGY INC·Filed 2013·Granted Sep 29, 2015·1 cites·12 claims
- 0655US9435030B2Radical reactor with inverted orientationVEECO ALD INC·Filed 2013·Granted Sep 6, 2016·0 cites·16 claims
- 0755US2015361548A1Injection Assembly in Linear Deposition Apparatus with Bulging Ridges Extending along Bottom OpeningsVEECO ALD INC·Filed 2014·Application pending·0 cites
- 0854US2014366804A1Performing Atomic Layer Deposition on Large Substrate Using Scanning ReactorsVEECO ALD INC·Filed 2014·Application pending·0 cites
- 0950US2016340779A1Radical Reactor With Inverted OrientationVEECO ALD INC·Filed 2016·Application pending·0 cites
- 1046US2015360242A1Linear Deposition Apparatus with Modular AssemblyVEECO ALD INC·Filed 2014·Application pending·0 cites
- 1145US9546423B2Cleaning of deposition device by injecting cleaning gas into deposition deviceVEECO ALD INC·Filed 2015·Granted Jan 17, 2017·0 cites·12 claims
- 1245US2010162955A1Systems and methods for substrate processingLEI LAWRENCE CHUNG-LAI·Filed 2008·Application pending·0 cites
- 1342US9556514B2Spatial deposition of material using short-distance reciprocating motionsVEECO ALD INC·Filed 2015·Granted Jan 31, 2017·0 cites·14 claims
- 1441USD732093SGas tube assemblyVEECO ALD INC·Filed 2014·Granted Jun 16, 2015·4 cites·1 claims
- 1541US2015275365A1Atomic Layer Deposition Using Injector Module ArraysVEECO ALD INC·Filed 2015·Application pending·0 cites
- 1627USD732092SGas injection plateVEECO ALD INC·Filed 2014·Granted Jun 16, 2015·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →