Radical Reactor With Inverted Orientation

Abstract

A radical reactor including an elongated structure received within a chamber of a body of the radical reactor. Radicals are generated within a radical chamber formed in the elongated structure by applying a voltage signal across the elongated structure and an electrode extending within the radical chamber. The radicals generated in the radical chamber are routed via a discharge port of the elongated structure and a conduit formed in the body of the radical reactor onto the substrate. The discharge port and the conduit are not aligned so that irradiation generated in the radical chamber is not directed to the substrate

1 . A method of discharging radicals onto a substrate, comprising:
 supplying gas into a radical chamber formed in an elongated structure placed in a cavity of a body of a radical reactor;   generating radicals in the radical chamber by disassociating the supplied gas;   discharging the radicals into the cavity via a discharge port formed at a side of the elongated structure;   routing the discharged radicals to a conduit formed in the body and connected to the cavity, wherein the conduit is not aligned with the discharge port to prevent irradiation generated in the radical chamber from reaching the substrate; and   routing the radicals onto the substrate via the conduit.   
     
     
         2 . The method of  claim 1 , wherein the supplied gas is disassociated by applying a voltage signal across the elongated structure and an electrode extending within the radical chamber. 
     
     
         3 . The method of  claim 1 , wherein the radicals are discharged from the radical chamber to the cavity towards a side of the radical reactor, and wherein the radicals are discharged from the conduit onto the substrate towards another side of the radical reactor opposite to the side of the radical reactor. 
     
     
         4 . The method of  claim 1 , wherein the discharged radicals are routed via paths provided at both sides of the elongated structure. 
     
     
         5 . The method of  claim 1 , wherein the radicals are discharged into the cavity via the discharge port in a first direction, and wherein a surface of the body faces the substrate in a second direction different from the first direction. 
     
     
         6 . The method of  claim 5 , wherein the second direction is opposite to the first direction. 
     
     
         7 . The method of  claim 5 , wherein the radicals are routed from the discharge port into the conduit along a curved path. 
     
     
         8 . The method of  claim 5 , wherein the radicals are routed onto the substrate in the second direction. 
     
     
         9 . The method of  claim 1 , wherein the substrate does not face the discharge port. 
     
     
         10 . The method of  claim 1 , wherein the discharged radicals are routed to the conduit through a path between the elongated structure and the body. 
     
     
         11 . The method of  claim 1 , further comprising discharging remaining radicals away from the substrate via an exhaust. 
     
     
         12 . The method of  claim 11 , wherein the remaining radicals are discharged away from the substrate via the exhaust in a first direction. 
     
     
         13 . The method of  claim 12 , wherein the radicals are discharged into the cavity via the discharge port in the first direction. 
     
     
         14 . The method of  claim 13 , wherein the radicals are routed onto the substrate in a second direction different from the first direction. 
     
     
         15 . The method of  claim 14 , wherein the second direction is opposite to the first direction. 
     
     
         16 . The method of  claim 11 , further comprising passing the radicals through a constriction zone between the exhaust and the conduit, wherein Venturi effect is caused in the constriction zone.