Assignee
VEECO ALD INC
US·8 granted patents·21 pending applications·28 citations·filing 2013–2016
Top patents by PatentIndex Score
29 records- 0193US9376455B2Molecular layer deposition using reduction processVEECO ALD INC·Filed 2014·Granted Jun 28, 2016·17 cites·13 claims
- 0286US8691669B2Vapor deposition reactor for forming thin filmVEECO ALD INC·Filed 2013·Granted Apr 8, 2014·7 cites·12 claims
- 0369US2014073212A1Textile Including Fibers Deposited with Material Using Atomic Layer Deposition for Increased Rigidity and StrengthVEECO ALD INC·Filed 2013·Application pending·0 cites
- 0469US2015020737A1Atomic Layer Deposition Using Radicals Of Gas MixtureVEECO ALD INC·Filed 2014·Application pending·0 cites
- 0568US2014370204A1Vapor Deposition Reactor Using Plasma and Method for Forming Thin Film Using the SameVEECO ALD INC·Filed 2014·Application pending·0 cites
- 0667US2014219905A1Vapor deposition reactor and method for forming thin filmVEECO ALD INC·Filed 2014·Application pending·0 cites
- 0767US2014174358A1Magnetic Field Assisted DepositionVEECO ALD INC·Filed 2014·Application pending·0 cites
- 0859US2016002783A1Enhanced deposition of layer on substrate using radicalsVEECO ALD INC·Filed 2015·Application pending·0 cites
- 0956US2014205769A1Cascaded plasma reactorVEECO ALD INC·Filed 2014·Application pending·0 cites
- 1055US9435030B2Radical reactor with inverted orientationVEECO ALD INC·Filed 2013·Granted Sep 6, 2016·0 cites·16 claims
- 1155US2014037853A1Depositing thin layer of material on permeable substrateVEECO ALD INC·Filed 2013·Application pending·0 cites
- 1255US2015361548A1Injection Assembly in Linear Deposition Apparatus with Bulging Ridges Extending along Bottom OpeningsVEECO ALD INC·Filed 2014·Application pending·0 cites
- 1354US2015086716A1Printing of colored pattern using atomic layer depositionVEECO ALD INC·Filed 2014·Application pending·0 cites
- 1454US2014366804A1Performing Atomic Layer Deposition on Large Substrate Using Scanning ReactorsVEECO ALD INC·Filed 2014·Application pending·0 cites
- 1551US2015104574A1Fast atomic layer deposition process using seed precursorVEECO ALD INC·Filed 2014·Application pending·0 cites
- 1650US2016340779A1Radical Reactor With Inverted OrientationVEECO ALD INC·Filed 2016·Application pending·0 cites
- 1747US2014141191A1Hydrophobic and Oleophobic Encapsulation Material with Alternating LayersVEECO ALD INC·Filed 2013·Application pending·0 cites
- 1846US2015360242A1Linear Deposition Apparatus with Modular AssemblyVEECO ALD INC·Filed 2014·Application pending·0 cites
- 1946US2017107614A1Multi-Step Atomic Layer Deposition Process for Silicon Nitride Film FormationVEECO ALD INC·Filed 2016·Application pending·0 cites
- 2045US9546423B2Cleaning of deposition device by injecting cleaning gas into deposition deviceVEECO ALD INC·Filed 2015·Granted Jan 17, 2017·0 cites·12 claims
- 2142US9558963B2Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiationVEECO ALD INC·Filed 2015·Granted Jan 31, 2017·0 cites·11 claims
- 2242US9556514B2Spatial deposition of material using short-distance reciprocating motionsVEECO ALD INC·Filed 2015·Granted Jan 31, 2017·0 cites·14 claims
- 2342US2015159271A1Deposition of non-isostructural layers for flexible substrateVEECO ALD INC·Filed 2014·Application pending·0 cites
- 2441USD732093SGas tube assemblyVEECO ALD INC·Filed 2014·Granted Jun 16, 2015·4 cites·1 claims
- 2541US2015275365A1Atomic Layer Deposition Using Injector Module ArraysVEECO ALD INC·Filed 2015·Application pending·0 cites
- 2640US2016032452A1Atomic Layer Deposition Method Using Source Precursor Transformed by Hydrogen Radical ExposureVEECO ALD INC·Filed 2015·Application pending·0 cites
- 2738US2014319488A1Thin film formation for device sensitive to environmentVEECO ALD INC·Filed 2014·Application pending·0 cites
- 2837US2015299857A1Deposition device with auxiliary injectors for injecting nucleophile gas and separation gasVEECO ALD INC·Filed 2015·Application pending·0 cites
- 2927USD732092SGas injection plateVEECO ALD INC·Filed 2014·Granted Jun 16, 2015·0 cites·1 claims
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