Inventor
LEE DANIEL HO
US4 patents
Patents
4 patentsUSD732093SJun 16, 2015
Gas tube assembly
VEECO ALD INC4 citations68
USD732092SJun 16, 2015
Gas injection plate
VEECO ALD INC0 citations47
US9435030B2Sep 6, 2016
Radical reactor with inverted orientation
VEECO ALD INC0 citations44
US9546423B2Jan 17, 2017
Cleaning of deposition device by injecting cleaning gas into deposition device
VEECO ALD INC0 citations36