P

Inventor

YANG HYOSEOK DANIEL

US5 patents
⚠️ This page may combine multiple inventors who share the name “YANG HYOSEOK DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VEECO ALD INC

3 patents
USD732093SJun 16, 2015

Gas tube assembly

VEECO ALD INC4 citations68
USD732092SJun 16, 2015

Gas injection plate

VEECO ALD INC0 citations47
US9546423B2Jan 17, 2017

Cleaning of deposition device by injecting cleaning gas into deposition device

VEECO ALD INC0 citations36

KLA TENCOR CORP

1 patent
US9423357B2Aug 23, 2016

Oblique illuminator for inspecting manufactured substrates

KLA TENCOR CORP0 citations49

ZHANG SHIYU

1 patent
US8794801B2Aug 5, 2014

Oblique illuminator for inspecting manufactured substrates

ZHANG SHIYU0 citations43