P

Inventor

CHEN HUA FENG

TW45 patents
⚠️ This page may combine multiple inventors who share the name “CHEN HUA FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

30 patents
US10074558B1Sep 11, 2018

FinFET structure with controlled air gaps

TAIWAN SEMICONDUCTOR MFG CO LTD18 citations94
US9536980B1Jan 3, 2017

Gate spacers and methods of forming same

TAIWAN SEMICONDUCTOR MFG CO LTD44 citations93
US9882023B2Jan 30, 2018

Sidewall spacers for self-aligned contacts

TAIWAN SEMICONDUCTOR MFG CO LTD16 citations91
US10872980B2Dec 22, 2020

Semiconductor device and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10553481B2Feb 4, 2020

Vias for cobalt-based interconnects and methods of fabrication thereof

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US9941125B2Apr 10, 2018

Method for integrated circuit patterning

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations82
US10516030B2Dec 24, 2019

Contact plugs and methods forming same

TAIWAN SEMICONDUCTOR MFG CO LTD10 citations81
US11908735B2Feb 20, 2024

Vias for cobalt-based interconnects and methods of fabrication thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11721763B2Aug 8, 2023

Semiconductor device and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11282751B2Mar 22, 2022

Dielectric fins with different dielectric constants and sizes in different regions of a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10297669B2May 21, 2019

Substrate resistor and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10727061B2Jul 28, 2020

Method for integrated circuit patterning

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US10930752B2Feb 23, 2021

Contact plugs and methods forming same

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US12588498B2Mar 24, 2026

FinFET structure with controlled air gaps

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12453164B2Oct 21, 2025

Dielectric fins with different dielectric constants and sizes in different regions of a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12288822B2Apr 29, 2025

Semiconductor device with source/drain contact

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11854875B2Dec 26, 2023

Contact structure of a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11804402B2Oct 31, 2023

FinFET structure with controlled air gaps

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11545390B2Jan 3, 2023

Method of fabricating a semiconductor device having a liner layer with a configured profile

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11404309B2Aug 2, 2022

Vias for cobalt-based interconnects and methods of fabrication thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11251181B2Feb 15, 2022

FinFET isolation structure and method for fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11217477B2Jan 4, 2022

Semiconductor device having a liner layer with a configured profile

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10720358B2Jul 21, 2020

Semiconductor device having a liner layer with a configured profile and method of fabricating thereof

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12464751B2Nov 4, 2025

Contact plugs and methods forming same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11862708B2Jan 2, 2024

Contact plugs and methods forming same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10879110B2Dec 29, 2020

FinFET structure with controlled air gaps

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10872963B2Dec 22, 2020

Substrate resistor and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10510751B2Dec 17, 2019

FinFET isolation structure and method for fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10332786B2Jun 25, 2019

Method for manufacturing a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
USRE48304ENov 10, 2020

Source and drain dislocation fabrication in FinFETs

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51

INVENTEC PUDONG TECH CORP

4 patents

ADLINK TECH INC

2 patents

TAIWAN SEMICONDUCTOR MFG

2 patents

PARABELLUM STRATEGIC OPPORTUNITIES FUND LLC

2 patents

LIU CHIA-CHU

1 patent

Chen hua-feng

1 patent

CHEN HUA FENG

1 patent

BROADCOM CORP

1 patent

TAIWAN SEMOCONDUCTOR MFG CO LTD

1 patent