Inventor
YANAGIHARA MASAMITSU
JP24 patents
⚠️ This page may combine multiple inventors who share the name “YANAGIHARA MASAMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
18 patentsUS5500736AMar 19, 1996
Method of detecting positions
NIKON CORP473 citations98
US5602620AFeb 11, 1997
Scanning exposure apparatus and exposure method
NIKON CORP63 citations96
US5581075ADec 3, 1996
Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area
NIKON CORP64 citations96
US5625436AApr 29, 1997
Scanning type exposure apparatus and exposure method
NIKON CORP73 citations95
US5486896AJan 23, 1996
Exposure apparatus
NIKON CORP80 citations95
US6552775B1Apr 22, 2003
Exposure method and apparatus
NIKON CORP118 citations93
US5999244ADec 7, 1999
Projection exposure apparatus, method for correcting positional discrepancy of projected image, and method for determining image formation characteristic of projection optical system
NIKON CORP36 citations92
US5623343AApr 22, 1997
Exposure method and apparatus
NIKON CORP27 citations92
US5617181AApr 1, 1997
Exposure apparatus and exposure method
NIKON CORP46 citations92
US5502313AMar 26, 1996
Exposure apparatus and method having a measuring unit for measuring distances between a mask surface and a projection optical system
NIKON CORP26 citations92
US6213607B1Apr 10, 2001
Exposure apparatus and field stop thereof
NIKON CORP16 citations91
US5640243AJun 17, 1997
Position detection method
NIKON CORP25 citations91
US6288772B1Sep 11, 2001
Scanning exposure method and scanning type exposure apparatus
NIKON CORP28 citations90
US5978094ANov 2, 1999
Alignment device and method based on imaging characteristics of the image pickup system
NIKON CORP16 citations73
US11854288B2Dec 26, 2023
Image determining device to determine the state of a subject
NIKON CORP1 citations72
US5936712AAug 10, 1999
Exposure method and apparatus including focus control
NIKON CORP8 citations69
US11055522B2Jul 6, 2021
Image determining device to determine the state of a subject
NIKON CORP0 citations61
US10275645B2Apr 30, 2019
Image determining device to determine the state of a subject
NIKON CORP0 citations51
NIPPON KOGAKU KK
4 patentsUS4687322AAug 18, 1987
Projection optical apparatus
NIPPON KOGAKU KK39 citations92
USRE37762EJun 25, 2002
Scanning exposure apparatus and exposure method
NIPPON KOGAKU KK8 citations73
US6325516B1Dec 4, 2001
Exposure apparatus and field stop thereof
NIPPON KOGAKU KK7 citations72
USRE37361ESep 11, 2001
Scanning type exposure apparatus and exposure method
NIPPON KOGAKU KK5 citations62