Inventor
KAANTA CARTER W
US23 patents
Patents
23 patentsUS5795830AAug 18, 1998
Reducing pitch with continuously adjustable line and space dimensions
IBM321 citations99
US4793895ADec 27, 1988
In situ conductivity monitoring technique for chemical/mechanical planarization endpoint detection
IBM330 citations99
US5126006AJun 30, 1992
Plural level chip masking
IBM133 citations97
US5034348AJul 23, 1991
Process for forming refractory metal silicide layers of different thicknesses in an integrated circuit
IBM129 citations97
US4956313ASep 11, 1990
Via-filling and planarization technique
IBM207 citations97
US4789648ADec 6, 1988
Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias
IBM526 citations97
US5091289AFeb 25, 1992
Process for forming multi-level coplanar conductor/insulator films employing photosensitive polyimide polymer compositions
IBM56 citations96
US5036630AAug 6, 1991
Radial uniformity control of semiconductor wafer polishing
IBM107 citations96
US4919750AApr 24, 1990
Etching metal films with complexing chloride plasma
IBM132 citations96
US5466636ANov 14, 1995
Method of forming borderless contacts using a removable mandrel
IBM63 citations95
US4987101AJan 22, 1991
Method for providing improved insulation in VLSI and ULSI circuits
IBM118 citations95
US6008083ADec 28, 1999
Precision analog metal-metal capacitor
IBM59 citations94
US5708559AJan 13, 1998
Precision analog metal-metal capacitor
IBM85 citations94
US5496771AMar 5, 1996
Method of making overpass mask/insulator for local interconnects
IBM53 citations93
US5189506AFeb 23, 1993
Triple self-aligned metallurgy for semiconductor devices
IBM45 citations93
US4758306AJul 19, 1988
Stud formation method optimizing insulator gap-fill and metal hole-fill
IBM28 citations93
US5334467AAug 2, 1994
Gray level mask
IBM27 citations92
US5229257AJul 20, 1993
Process for forming multi-level coplanar conductor/insulator films employing photosensitive polymide polymer compositions
IBM22 citations92
US5213916AMay 25, 1993
Method of making a gray level mask
IBM45 citations92
US5136124AAug 4, 1992
Method of forming conductors within an insulating substrate
IBM27 citations92
US4944682AJul 31, 1990
Method of forming borderless contacts
IBM36 citations91
US4985990AJan 22, 1991
Method of forming conductors within an insulating substrate
IBM17 citations74
US5144411ASep 1, 1992
Method and structure for providing improved insulation in vlsi and ulsi circuits
IBM14 citations73