Inventor

CHUNG JU-HYUCK

KR9 patents

⚠️ This page may combine multiple inventors who share the name “CHUNG JU-HYUCK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

7 patents

US6464794B1Oct 15, 2002

Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates

SAMSUNG ELECTRONICS CO LTD75 citations94

US6291342B2Sep 18, 2001

Methods of forming titanium nitride composite layers using composite gases having increasing TiCl4 to NH3 ratios

SAMSUNG ELECTRONICS CO LTD19 citations92

US7176126B2Feb 13, 2007

Method of fabricating dual damascene interconnection

SAMSUNG ELECTRONICS CO LTD39 citations91

US6797109B2Sep 28, 2004

Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates

SAMSUNG ELECTRONICS CO LTD7 citations71

US7645695B2Jan 12, 2010

Method of manufacturing a semiconductor element

SAMSUNG ELECTRONICS CO LTD3 citations62

US7553761B2Jun 30, 2009

Method of fabricating semiconductor device

SAMSUNG ELECTRONICS CO LTD3 citations61

US7884425B2Feb 8, 2011

Non-volatile memory devices

SAMSUNG ELECTRONICS CO LTD0 citations52

SAMSUNG ELECTRONICS CO INC

1 patent

US6207557B1Mar 27, 2001

Method of forming multilayer titanium nitride film by multiple step chemical vapor deposition process and method of manufacturing semiconductor device using the same

SAMSUNG ELECTRONICS CO INC27 citations92

SEL JONG-SUN

1 patent

US8217467B2Jul 10, 2012

Semiconductor memory devices

SEL JONG-SUN0 citations51