Inventor

BARNA GABRIEL G

US12 patents

Patents

12 patents

US5864773AJan 26, 1999

Virtual sensor based monitoring and fault detection/classification system and method for semiconductor processing equipment

TEXAS INSTRUMENTS INC259 citations96

US4847792AJul 11, 1989

Process and apparatus for detecting aberrations in production process operations

TEXAS INSTRUMENTS INC140 citations95

US5512130AApr 30, 1996

Method and apparatus of etching a clean trench in a semiconductor material

TEXAS INSTRUMENTS INC115 citations94

US5326975AJul 5, 1994

Measurement of gas leaks into gas lines of a plasma reactor

TEXAS INSTRUMENTS INC47 citations92

US4859277AAug 22, 1989

Method for measuring plasma properties in semiconductor processing

TEXAS INSTRUMENTS INC43 citations91

US6104487AAug 15, 2000

Plasma etching with fast endpoint detector

TEXAS INSTRUMENTS INC28 citations86

US7344957B2Mar 18, 2008

SOI wafer with cooling channels and a method of manufacture thereof

TEXAS INSTRUMENTS INC9 citations83

US6438439B1Aug 20, 2002

Equipment evaluation and design

TEXAS INSTRUMENTS INC6 citations73

US7198993B2Apr 3, 2007

Method of fabricating a combined fully-depleted silicon-on-insulator (FD-SOI) and partially-depleted silicon-on-insulator (PD-SOI) devices

TEXAS INSTRUMENTS INC7 citations70

US6875656B2Apr 5, 2005

Method for improving silicon-on-insulator (SOI) film uniformity on a semiconductor wafer

TEXAS INSTRUMENTS INC3 citations62

US5254216AOct 19, 1993

Oxygen scavenging in a plasma reactor

TEXAS INSTRUMENTS INC2 citations60

US7939398B2May 10, 2011

Method to manufacture silicon quantum islands and single-electron devices

TEXAS INSTRUMENTS INC1 citations45