Inventor
LIAW ING-RUEY
TW33 patents
⚠️ This page may combine multiple inventors who share the name “LIAW ING-RUEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VANGUARD INT SEMICONDUCT CORP
29 patentsUS5792687AAug 11, 1998
Method for fabricating high density integrated circuits using oxide and polysilicon spacers
VANGUARD INT SEMICONDUCT CORP148 citations98
US6344392B1Feb 5, 2002
Methods of manufacture of crown or stack capacitor with a monolithic fin structure made with a different oxide etching rate in hydrogen fluoride vapor
VANGUARD INT SEMICONDUCT CORP53 citations96
US6136643AOct 24, 2000
Method for fabricating capacitor-over-bit-line dynamic random access memory (DRAM) using self-aligned contact etching technology
VANGUARD INT SEMICONDUCT CORP76 citations96
US5712202AJan 27, 1998
Method for fabricating a multiple walled crown capacitor of a semiconductor device
VANGUARD INT SEMICONDUCT CORP62 citations96
US5710073AJan 20, 1998
Method for forming interconnections and conductors for high density integrated circuits
VANGUARD INT SEMICONDUCT CORP67 citations96
US6017614AJan 25, 2000
Plasma-enhanced chemical vapor deposited SIO2 /SI3 N4 multilayer passivation layer for semiconductor applications
VANGUARD INT SEMICONDUCT CORP70 citations95
US5956587ASep 21, 1999
Method for crown type capacitor in dynamic random access memory
VANGUARD INT SEMICONDUCT CORP76 citations95
US5851603ADec 22, 1998
Method for making a plasma-enhanced chemical vapor deposited SiO2 Si3 N4 multilayer passivation layer for semiconductor applications
VANGUARD INT SEMICONDUCT CORP59 citations95
US5905293AMay 18, 1999
LDD spacers in MOS devices with double spacers
VANGUARD INT SEMICONDUCT CORP33 citations93
US5763312AJun 9, 1998
Method of fabricating LDD spacers in MOS devices with double spacers and device manufactured thereby
VANGUARD INT SEMICONDUCT CORP43 citations93
US6476437B2Nov 5, 2002
Crown or stack capacitor with a monolithic fin structure
VANGUARD INT SEMICONDUCT CORP33 citations92
US6168987B1Jan 2, 2001
Method for fabricating crown-shaped capacitor structures
VANGUARD INT SEMICONDUCT CORP27 citations92
US6133599AOct 17, 2000
Design and a novel process for formation of DRAM bit line and capacitor node contacts
VANGUARD INT SEMICONDUCT CORP25 citations92
US6008085ADec 28, 1999
Design and a novel process for formation of DRAM bit line and capacitor node contacts
VANGUARD INT SEMICONDUCT CORP39 citations92
US5998279ADec 7, 1999
Manufacture of a shallow trench isolation device by exposing negative photoresist to increased exposure energy and chemical mechanical planarization
VANGUARD INT SEMICONDUCT CORP26 citations92
US5543345AAug 6, 1996
Method for fabricating crown capacitors for a dram cell
VANGUARD INT SEMICONDUCT CORP34 citations92
US6171929B1Jan 9, 2001
Shallow trench isolator via non-critical chemical mechanical polishing
VANGUARD INT SEMICONDUCT CORP30 citations90
US6277719B1Aug 21, 2001
Method for fabricating a low resistance Poly-Si/metal gate
VANGUARD INT SEMICONDUCT CORP28 citations89
US5837576ANov 17, 1998
Method for forming a capacitor using a silicon oxynitride etching stop layer
VANGUARD INT SEMICONDUCT CORP30 citations89
US6008075ADec 28, 1999
Method for simultaneous formation of contacts between metal layers and fuse windows in semiconductor manufacturing
VANGUARD INT SEMICONDUCT CORP34 citations86
US6555433B2Apr 29, 2003
Method of manufacture of a crown or stack capacitor with a monolithic fin structure made with a different oxide etching rate in hydrogen fluoride vapor
VANGUARD INT SEMICONDUCT CORP12 citations74
US6239014B1May 29, 2001
Tungsten bit line structure featuring a sandwich capping layer
VANGUARD INT SEMICONDUCT CORP12 citations74
US6087253AJul 11, 2000
Method of forming landing plugs for PMOS and NMOS
VANGUARD INT SEMICONDUCT CORP11 citations74
US6249018B1Jun 19, 2001
Fabrication method to approach the conducting structure of a DRAM cell with straightforward bit line
VANGUARD INT SEMICONDUCT CORP8 citations73
US5923973AJul 13, 1999
Method of making greek letter psi shaped capacitor for DRAM circuits
VANGUARD INT SEMICONDUCT CORP15 citations73
US6351037B1Feb 26, 2002
Method for making polycide-to-polycide low contact resistance contacts for interconnections on integrated circuits
VANGUARD INT SEMICONDUCT CORP3 citations62
US6150247ANov 21, 2000
Method for making polycide-to-polycide low contact resistance contacts for interconnections on integrated circuits
VANGUARD INT SEMICONDUCT CORP4 citations62
US6762096B1Jul 13, 2004
Method for forming a polysilicon spacer with a vertical profile
VANGUARD INT SEMICONDUCT CORP3 citations54
US7129134B2Oct 31, 2006
Fabrication method for flash memory source line and flash memory
VANGUARD INT SEMICONDUCT CORP0 citations39
IND TECH RES INST
3 patentsUS5874359AFeb 23, 1999
Small contacts for ultra large scale integration semiconductor devices without separation ground rule
IND TECH RES INST65 citations94
US5480837AJan 2, 1996
Process of making an integrated circuit having a planar conductive layer
IND TECH RES INST36 citations86
US5491104AFeb 13, 1996
Method for fabricating DRAM cells having fin-type stacked storage capacitors
IND TECH RES INST16 citations73