Inventor
FLAMM DANIEL L
20 patents
⚠️ This page may combine multiple inventors who share the name “FLAMM DANIEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BELL TELEPHONE LABOR INC
6 patentsUS4310380AJan 12, 1982
Plasma etching of silicon
BELL TELEPHONE LABOR INC136 citations96
US4377436AMar 22, 1983
Plasma-assisted etch process with endpoint detection
BELL TELEPHONE LABOR INC39 citations92
US4314875AFeb 9, 1982
Device fabrication by plasma etching
BELL TELEPHONE LABOR INC37 citations92
US4372834AFeb 8, 1983
Purification process for compounds useful in optical fiber manufacture
BELL TELEPHONE LABOR INC29 citations91
US4394237AJul 19, 1983
Spectroscopic monitoring of gas-solid processes
BELL TELEPHONE LABOR INC27 citations82
US4397711AAug 9, 1983
Crystallographic etching of III-V semiconductor materials
BELL TELEPHONE LABOR INC23 citations81
FLAMM DANIEL L
6 patentsUS6127275AOct 3, 2000
Process depending on plasma discharges sustained by inductive coupling
FLAMM DANIEL L73 citations95
US5304282AApr 19, 1994
Processes depending on plasma discharges sustained in a helical resonator
FLAMM DANIEL L69 citations95
US6231776B1May 15, 2001
Multi-temperature processing
FLAMM DANIEL L24 citations92
US5980766ANov 9, 1999
Process optimization in gas phase dry etching
FLAMM DANIEL L36 citations89
US5711849AJan 27, 1998
Process optimization in gas phase dry etching
FLAMM DANIEL L24 citations89
USRE40264EApr 29, 2008
Multi-temperature processing
FLAMM DANIEL L6 citations73