Inventor
CHEN HUNG-HAO
TW17 patents
⚠️ This page may combine multiple inventors who share the name “CHEN HUNG-HAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
14 patentsUS9355893B1May 31, 2016
Method for preventing extreme low-K (ELK) dielectric layer from being damaged during plasma process
TAIWAN SEMICONDUCTOR MFG CO LTD21 citations92
US11217485B2Jan 4, 2022
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10679863B2Jun 9, 2020
Method for forming semiconductor device structure with fine line pitch and fine end-to-end space
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10008559B2Jun 26, 2018
Etching process control in forming MIM capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12272595B2Apr 8, 2025
Removing polymer through treatment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11776853B2Oct 3, 2023
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11217458B2Jan 4, 2022
Method for forming semiconductor device structure with fine line pitch and fine end-to-end space
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11171040B2Nov 9, 2021
Removing polymer through treatment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9735028B2Aug 15, 2017
Method for forming semiconductor device structure with fine line pitch and fine end-to-end space
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10854505B2Dec 1, 2020
Removing polymer through treatment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10825892B2Nov 3, 2020
MIM capacitor with top electrode having footing profile and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10541298B2Jan 21, 2020
Etching process control in forming MIM capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10535566B2Jan 14, 2020
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10535727B2Jan 14, 2020
Etching process control in forming MIM capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52