Inventor · disambiguated record
Wataru Karasawa
Also filed as: KARASAWA WATARU
14 granted patents·3 pending applications·739 citations·filing 1987–2006
95Inventor score
Top patents by PatentIndex Score
17 records- 0194US7454317B2Apparatus productivity improving system and its methodTOKYO ELECTRON LTD·Filed 2006·Granted Nov 18, 2008·26 cites·9 claims
- 0294US5404111AProbe apparatus with a swinging holder for an object of examinationTOKYO ELECTRON LTD·Filed 1993·Granted Apr 4, 1995·146 cites·11 claims
- 0393US5321453AProbe apparatus for probing an object held above the probe cardTOKYO ELECTRON LTD·Filed 1992·Granted Jun 14, 1994·128 cites·10 claims
- 0492US7133807B2Apparatus productivity improving system and its methodTOKYO ELECTRON LTD·Filed 2002·Granted Nov 7, 2006·45 cites·32 claims
- 0589USD320361SWafer probe plate holderTOKYO ELECTRON LTD·Filed 1989·Granted Oct 1, 1991·29 cites·1 claims
- 0688US5436571AProbing test method of contacting a plurality of probes of a probe card with pads on a chip on a semiconductor waferTOKYO ELECTRON LTD·Filed 1994·Granted Jul 25, 1995·122 cites·16 claims
- 0788US4965515AApparatus and method of testing a semiconductor waferTOKYO ELECTRON LTD·Filed 1989·Granted Oct 23, 1990·54 cites·9 claims
- 0885US4985676AMethod and apparatus of performing probing test for electrically and sequentially testing semiconductor device patternsTOKYO ELECTRON LTD·Filed 1989·Granted Jan 15, 1991·72 cites·6 claims
- 0984US6839603B2Semiconductor manufacturing system and control method thereofTOKYO ELECTRON LTD·Filed 2001·Granted Jan 4, 2005·37 cites·26 claims
- 1076US5374888AElectrical characteristics measurement method and measurement apparatus thereforTOKYO ELECTRON LTD·Filed 1992·Granted Dec 20, 1994·40 cites·5 claims
- 1161US5124931AMethod of inspecting electric characteristics of wafers and apparatus thereforTOKYO ELECTRON LTD·Filed 1989·Granted Jun 23, 1992·21 cites·9 claims
- 1260US2006010087A1Sharging method and charging systemKARASAWA WATARU·Filed 2003·Application pending·0 cites
- 1345US5086270AProbe apparatusTOKYO ELECTRON LTD·Filed 1990·Granted Feb 4, 1992·12 cites·8 claims
- 1442US2008124192A1Relay Station And Substrate Processing System Using Relay StationKARASAWA WATARU·Filed 2006·Application pending·0 cites
- 1540US4812901AProbe apparatusTOKYO ELECTRON LTD·Filed 1987·Granted Mar 14, 1989·7 cites·5 claims
- 1639US6969620B2Semiconductor device inspection systemTOKYO ELECTRON LTD·Filed 2001·Granted Nov 29, 2005·0 cites·15 claims
- 1736US2007004051A1Processing method and deviceOKUMOTO YASUHIRO·Filed 2003·Application pending·0 cites
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