Inventor
SYVERSON DANIEL J
US6 patents
⚠️ This page may combine multiple inventors who share the name “SYVERSON DANIEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
4 patentsUS4900395AFeb 13, 1990
HF gas etching of wafers in an acid processor
FSI INT INC332 citations97
US5169408ADec 8, 1992
Apparatus for wafer processing with in situ rinse
FSI INT INC201 citations94
US4857142AAug 15, 1989
Method and apparatus for controlling simultaneous etching of front and back sides of wafers
FSI INT INC72 citations94
US5458724AOct 17, 1995
Etch chamber with gas dispersing membrane
FSI INT INC37 citations88