Inventor
SCHEUERER ROLAND
DE7 patents
⚠️ This page may combine multiple inventors who share the name “SCHEUERER ROLAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCHEUERER ROLAND
4 patentsUS8181522B2May 22, 2012
Capacitive acceleration sensor having a movable mass and a spring element
SCHEUERER ROLAND3 citations58
US8564078B2Oct 22, 2013
Method for producing a micromechanical component having a trench structure for backside contact
SCHEUERER ROLAND0 citations48
US8419957B2Apr 16, 2013
Method for producing a micromechanical component having a filler layer and a masking layer
SCHEUERER ROLAND0 citations48
US8138006B2Mar 20, 2012
Method for producing a micromechanical component having a trench structure for backside contact
SCHEUERER ROLAND0 citations48