Inventor · disambiguated record
Muneyuki Otani
Also filed as: OTANI MUNEYUKI
4 granted patents·8 pending applications·16 citations·filing 2010–2024
68Inventor score
Top patents by PatentIndex Score
12 records- 0192US9551068B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jan 24, 2017·12 cites·11 claims
- 0284US9441291B2Method of depositing a filmTOKYO ELECTRON LTD·Filed 2015·Granted Sep 13, 2016·2 cites·9 claims
- 0368US8895456B2Method of depositing a filmTOKYO ELECTRON LTD·Filed 2013·Granted Nov 25, 2014·2 cites·20 claims
- 0464US2025003070A1Substrate-processing apparatus and film-forming methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0555US2023407466A1Deposition method and deposition apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0650US2020130300A1Coating methodNIDEC CORP·Filed 2018·Application pending·0 cites
- 0748US11737276B2Method of manufacturing semiconductor device and semiconductor deviceTOKYO ELECTRON LTD·Filed 2021·Granted Aug 22, 2023·0 cites·9 claims
- 0845US2011159188A1Film deposition apparatus, film deposition method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0944US2015184294A1Film deposition apparatus, film deposition method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 1040US2019377104A1Lens and lens manufacturing methodNIDEC CORP·Filed 2018·Application pending·0 cites
- 1138US2018245216A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1237US2018237914A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →