Inventor · disambiguated record
Shun-Der Wu
Also filed as: WU SHUN-DER
5 granted patents·1 pending application·38 citations·filing 2011–2018
75Inventor score
Top patents by PatentIndex Score
6 records- 0197US9625824B2Extreme ultraviolet lithography collector contamination reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 18, 2017·30 cites·20 claims
- 0295US9678431B2EUV lithography system and method with optimized throughput and stabilityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jun 13, 2017·6 cites·20 claims
- 0374US9607833B2System and method for photomask particle detectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 28, 2017·2 cites·19 claims
- 0466US10520823B2EUV lithography system and method with optimized throughput and stabilityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 31, 2019·0 cites·20 claims
- 0561US10156790B2EUV lithography system and method with optimized throughput and stabilityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 18, 2018·0 cites·19 claims
- 0640US2011273685A1Production of an alignment markASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
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