Inventor

GOTH GEORGE R

US21 patents

⚠️ This page may combine multiple inventors who share the name “GOTH GEORGE R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GOTH GEORGE R

IBM

Lateral device structures using self-aligned fabrication techniques

Method of making trench-incorporated monolithic semiconductor capacitor and high density dynamic memory cells including the capacitor

Method of selectively exposing the sidewalls of a trench and its use to the forming of a metal silicide substrate contact for dielectric filled deep trench isolated devices

Metal silicide channel stoppers for integrated circuits and method for making the same

Self-aligned channel stop

Self-aligned metal process for integrated circuit metallization

Method of making shallow junction complementary vertical bipolar transistor pair

Method of forming self-aligned P contact

Self-aligned polysilicon base contact structure

Self-aligned metal process for integrated circuit metallization

Process controller for balancing usage of tool sets

Trench etch process for dielectric isolation

Method for making metal contact studs between first level metal and regions of a semiconductor device compatible with polyimide-filled deep trench isolation schemes

Planarization process for organic filling of deep trenches

Lateral device structures using self-aligned fabrication techniques

Self-aligned metal structure for integrated circuits

Forming adjacent impurity regions in a semiconductor by oxide masking

Methods to control the threshold voltage of a deep trench corner device

Reduction of chemical mechanical planarization (CMP) scratches with sacrificial dielectric polish stop

SIEMENS AG

Methods for protecting device components from chemical mechanical polish induced defects

GOTH GEORGE R

Lateral device structures using self-aligned fabrication techniques