Inventor
LUND JENNIFER L
US14 patents
Patents
14 patentsUS6639488B2Oct 28, 2003
MEMS RF switch with low actuation voltage
IBM75 citations95
US6492708B2Dec 10, 2002
Integrated coil inductors for IC devices
IBM46 citations95
US7256670B2Aug 14, 2007
Diaphragm activated micro-electromechanical switch
IBM32 citations92
US7045372B2May 16, 2006
Apparatus and method for forming a battery in an integrated circuit
IBM31 citations92
US6977569B2Dec 20, 2005
Lateral microelectromechanical system switch
IBM33 citations92
US6917268B2Jul 12, 2005
Lateral microelectromechanical system switch
IBM41 citations92
US6876282B2Apr 5, 2005
Micro-electro-mechanical RF switch
IBM18 citations92
US6762088B2Jul 13, 2004
High Q inductor with faraday shield and dielectric well buried in substrate
IBM28 citations92
US6720230B2Apr 13, 2004
Method of fabricating integrated coil inductors for IC devices
IBM29 citations92
US6650000B2Nov 18, 2003
Apparatus and method for forming a battery in an integrated circuit
IBM37 citations92
US6563464B2May 13, 2003
Integrated on-chip half-wave dipole antenna structure
IBM21 citations92
US6534843B2Mar 18, 2003
High Q inductor with faraday shield and dielectric well buried in substrate
IBM35 citations92
US6836029B2Dec 28, 2004
Micro-electromechanical switch having a conductive compressible electrode
IBM18 citations84
US7212091B2May 1, 2007
Micro-electro-mechanical RF switch
IBM7 citations73