Inventor
URANO YUJI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “URANO YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
6 patentsUSD740769SOct 13, 2015
Boat for substrate processing apparatus
HITACHI INT ELECTRIC INC23 citations92
US9620357B2Apr 11, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC8 citations83
USD739831SSep 29, 2015
Boat for substrate processing apparatus
HITACHI INT ELECTRIC INC15 citations83
US9895727B2Feb 20, 2018
Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations73
US9587308B2Mar 7, 2017
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations72
US9881789B2Jan 30, 2018
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC1 citations51
KAMEDA KENJI
2 patentsKOKUSAI ELECTRIC CORP
2 patentsUS12195848B2Jan 14, 2025
Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US11618947B2Apr 4, 2023
Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations61