P

Inventor

MAHAWILI IMAD

US27 patents
⚠️ This page may combine multiple inventors who share the name “MAHAWILI IMAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRO C TECHNOLOGIES INC

8 patents
US6530994B1Mar 11, 2003

Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing

MICRO C TECHNOLOGIES INC416 citations99
USRE37546EFeb 12, 2002

Reactor and method of processing a semiconductor substrate

MICRO C TECHNOLOGIES INC201 citations99
US6090212AJul 18, 2000

Substrate platform for a semiconductor substrate during rapid high temperature processing and method of supporting a substrate

MICRO C TECHNOLOGIES INC721 citations99
US6007635ADec 28, 1999

Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing

MICRO C TECHNOLOGIES INC228 citations99
US5951896ASep 14, 1999

Rapid thermal processing heater technology and method of use

MICRO C TECHNOLOGIES INC226 citations99
US5814365ASep 29, 1998

Reactor and method of processing a semiconductor substate

MICRO C TECHNOLOGIES INC237 citations99
US6310323B1Oct 30, 2001

Water cooled support for lamps and rapid thermal processing chamber

MICRO C TECHNOLOGIES INC24 citations91
US6544339B1Apr 8, 2003

Rectilinear wedge geometry for optimal process control in chemical vapor deposition and rapid thermal processing

MICRO C TECHNOLOGIES INC1 citations52

(unassigned)

3 patents
US5486207AJan 23, 1996

Thermal pad for portable body heating/cooling system and method of use

180 citations99
US6617538B1Sep 9, 2003

Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatements

25 citations92
US5591220AJan 7, 1997

Fluid replacement apparatus for use with a portable heating and cooling system

14 citations74

EDWARDS VACUUM LLC

3 patents
US11931682B2Mar 19, 2024

Waste gas abatement technology for semiconductor processing

EDWARDS VACUUM LLC0 citations52
US11786858B2Oct 17, 2023

Liquid filter apparatus for gas/solid separation for semiconductor processes

EDWARDS VACUUM LLC0 citations52
US11705345B2Jul 18, 2023

Semiconductor system with steam generator and reactor

EDWARDS VACUUM LLC0 citations52

HITACHI INT ELECTRIC INC

2 patents
US6800830B2Oct 5, 2004

Chemistry for boron diffusion barrier layer and method of application in semiconductor device fabrication

HITACHI INT ELECTRIC INC248 citations99
US6965092B2Nov 15, 2005

Ultra fast rapid thermal processing chamber and method of use

HITACHI INT ELECTRIC INC20 citations92

WATKINS JOHNSON CO

2 patents
US5059770AOct 22, 1991

Multi-zone planar heater assembly and method of operation

WATKINS JOHNSON CO155 citations99
US4993358AFeb 19, 1991

Chemical vapor deposition reactor and method of operation

WATKINS JOHNSON CO369 citations99

GENUS INC

2 patents
US4550684ANov 5, 1985

Cooled optical window for semiconductor wafer heating

GENUS INC77 citations96
US4680447AJul 14, 1987

Cooled optical window for semiconductor wafer heating

GENUS INC43 citations92

FOCUS SEMICONDUCTOR SYSTEMS

2 patents
US4834022AMay 30, 1989

CVD reactor and gas injection system

FOCUS SEMICONDUCTOR SYSTEMS34 citations92
US4673799AJun 16, 1987

Fluidized bed heater for semiconductor processing

FOCUS SEMICONDUCTOR SYSTEMS10 citations73

MAHAWILI IMAD

2 patents
US5336249AAug 9, 1994

Portable body heating/cooling system and method of use

MAHAWILI IMAD29 citations91
US8178987B2May 15, 2012

Wind turbine

MAHAWILI IMAD14 citations82

AMERICAN FLOW SYSTEMS INC

1 patent
US4315523AFeb 16, 1982

Electronically controlled flow meter and flow control system

AMERICAN FLOW SYSTEMS INC196 citations96

KOKUSAI SEMICONDUCTOR EQUIPMEN

1 patent
US6783627B1Aug 31, 2004

Reactor with remote plasma system and method of processing a semiconductor substrate

KOKUSAI SEMICONDUCTOR EQUIPMEN32 citations89

E NET LLC

1 patent
US8049351B2Nov 1, 2011

Turbine energy generating system

E NET LLC8 citations79