Inventor
TSAI JULIE A
US11 patents
Patents
11 patentsUS6521964B1Feb 18, 2003
Device having spacers for improved salicide resistance on polysilicon gates
INTEL CORP241 citations99
US6509618B2Jan 21, 2003
Device having thin first spacers and partially recessed thick second spacers for improved salicide resistance on polysilicon gates
INTEL CORP239 citations99
US6506652B2Jan 14, 2003
Method of recessing spacers to improved salicide resistance on polysilicon gates
INTEL CORP239 citations99
US6777760B1Aug 17, 2004
Device with recessed thin and thick spacers for improved salicide resistance on polysilicon gates
INTEL CORP13 citations92
US6593633B2Jul 15, 2003
Method and device for improved salicide resistance on polysilicon gates
INTEL CORP16 citations92
US6188117B1Feb 13, 2001
Method and device for improved salicide resistance on polysilicon gates
INTEL CORP16 citations92
US6235598B1May 22, 2001
Method of using thick first spacers to improve salicide resistance on polysilicon gates
INTEL CORP8 citations82
US7211872B2May 1, 2007
Device having recessed spacers for improved salicide resistance on polysilicon gates
INTEL CORP1 citations63
US6271096B1Aug 7, 2001
Method and device for improved salicide resistance on polysilicon gates
INTEL CORP2 citations63
US6268254B1Jul 31, 2001
Method and device for improved salicide resistance on polysilicon gates
INTEL CORP1 citations63
US6251762B1Jun 26, 2001
Method and device for improved salicide resistance on polysilicon gates
INTEL CORP5 citations63