Inventor
CONNORS PAUL
US10 patents
Patents
10 patentsUS9355876B2May 31, 2016
Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations
APPLIED MATERIALS INC452 citations95
US10679830B2Jun 9, 2020
Cleaning process for removing boron-carbon residuals in processing chamber at high temperature
APPLIED MATERIALS INC2 citations72
US11031262B2Jun 8, 2021
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC2 citations71
US10636684B2Apr 28, 2020
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
USD1110979SFeb 3, 2026
Process chamber collimator
APPLIED MATERIALS INC0 citations61
USD1103950SDec 2, 2025
Process chamber collimator
APPLIED MATERIALS INC0 citations61
US10950445B2Mar 16, 2021
Deposition of metal silicide layers on substrates and chamber components
APPLIED MATERIALS INC0 citations60
US9490154B2Nov 8, 2016
Method of aligning substrate-scale mask with substrate
APPLIED MATERIALS INC1 citations51
US10734232B2Aug 4, 2020
Deposition of metal silicide layers on substrates and chamber components
APPLIED MATERIALS INC0 citations49