USD1103950SActiveUtility

Process chamber collimator

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Assignee: APPLIED MATERIALS INCPriority: Mar 21, 2024Filed: Mar 21, 2024Granted: Dec 2, 2025
Est. expiryMar 21, 2044(~17.7 yrs left)· nominal 20-yr term from priority
Inventors:Martin Lee RikerPaul ConnorsJunjie PanXiangjin XieKevin KashefiYao-Ching Wu
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PatentIndex Score
0
Cited by
59
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a process chamber collimator, as shown and described.

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