Inventor

MIYAKE AKIRA

JP94 patents

⚠️ This page may combine multiple inventors who share the name “MIYAKE AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MIYAKE AKIRA

CANON KK

X-ray optical apparatus and device fabrication method

Optical measuring device

Method of evaluating optical element

Exposure apparatus, control method thereof, and device manufacturing method using the same

Optical arrangement and illumination method

X-ray exposure method and apparatus and device manufacturing method

Reflection type mask and manufacture of microdevices using the same

Optical arrangement for exposure apparatus

Light generator and exposure apparatus

Adjustment method and apparatus of optical system, and exposure apparatus

Optical apparatus

Differential pumping system and exposure apparatus

Debris removing system for use in X-ray light source

X-ray illumination optical system and x-ray reduction exposure apparatus

Electron beam exposure apparatus

Electron beam exposure apparatus

X-ray generating device, and exposure apparatus and semiconductor device production method using the X-ray generating device

Illumination system and exposure apparatus having the same

Production method of an x-ray mask structure, an x-ray mask structure produced thereby, and a device fabricated by using the x-ray mask structure

Apparatus for evaluating EUV light source, and evaluation method using the same

Assembly and adjusting method of optical system, exposure apparatus having the optical system

Optical apparatus, measurement method, and semiconductor device manufacturing method

Mirror device, mirror adjustment method, exposure apparatus, exposure method, and semiconductor device manufacturing method

Differential pumping system and exposure apparatus

Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method

Mask and exposure apparatus using the same

Beam position detecting device

Angle detecting device and optical apparatus, such as exposure apparatus, employing the same

X-ray mask support and process for preparation thereof

Multilayer mirror, evaluation method, exposure apparatus, device manufacturing method

Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method

HITACHI MAXELL

Magnetic disk which reduces deterioration in regenerated signals due to optical servo grooves

Magnetic recording medium comprising a substrate coated with a primer which is a protonic acid doped polyaniline polymer

Magnetic disc

Magnetic disc cartridge including a magnetic disc having a cleaning sheet composed of a non-theroplastic fiber

Magnetic recording medium

Magnetic recording medium

Magnetic powder and magnetic recording medium comprising the same

Magnetic recording medium

Magnetic recording medium

Acicular ferromagnetic metal particles and method for preparation of the same

Magnetic disc

OHBAYASHI CORP

Walk-through type waterproof screen apparatus

ASTELLAS PHARMA INC

2,4,6-Triamino-1,3,5-triazine derivative

TABUCHI TOMOYA

Light emitting device and illumination apparatus

TAKASE HIROMITSU

In situ cleaning device for lithographic apparatus

MAZDA MOTOR

Bonnet structure of automotive vehicle

KURARAY CHEMICAL KK

Evaporated fuel gas adsorbent, evaporated fuel gas trapping apparatus, active carbon and process for producing the same

MIYAKE AKIRA

Process of manufacturing a sleeve and wedge for an anchor bolt

MASAKI FUMITARO

Mirror, method of manufacturing the same, exposure apparatus, and device manufacturing method