Inventor
DEVINE DANIEL J
US19 patents
⚠️ This page may combine multiple inventors who share the name “DEVINE DANIEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
8 patentsUS7232767B2Jun 19, 2007
Slotted electrostatic shield modification for improved etch and CVD process uniformity
MATTSON TECH INC25 citations92
US7563068B2Jul 21, 2009
Low cost high throughput processing platform
MATTSON TECH INC16 citations91
US7115837B2Oct 3, 2006
Selective reflectivity process chamber with customized wavelength response and method
MATTSON TECH INC38 citations91
US7972444B2Jul 5, 2011
Workpiece support with fluid zones for temperature control
MATTSON TECH INC20 citations90
US7276122B2Oct 2, 2007
Multi-workpiece processing chamber
MATTSON TECH INC25 citations90
US7045746B2May 16, 2006
Shadow-free shutter arrangement and method
MATTSON TECH INC21 citations88
US7737385B2Jun 15, 2010
Selective reflectivity process chamber with customized wavelength response and method
MATTSON TECH INC13 citations82
US7977258B2Jul 12, 2011
Method and system for thermally processing a plurality of wafer-shaped objects
MATTSON TECH INC11 citations80
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
2 patentsUS6423248B1Jul 23, 2002
Method of making green emitting alkaline earth aluminate phosphor for VUV excited light emitting device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD21 citations91
US5952781ASep 14, 1999
Electrode for high contrast gas discharge panel and the method for manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations63