Inventor
YAMAGATA KAZUMI
JP9 patents
Patents
9 patentsUS6060892AMay 9, 2000
Probe card attaching mechanism
TOKYO ELECTRON LTD124 citations96
US6118290ASep 12, 2000
Prober and method for cleaning probes provided therein
TOKYO ELECTRON LTD52 citations92
US5640100AJun 17, 1997
Probe apparatus having probe card exchanging mechanism
TOKYO ELECTRON LTD32 citations92
US7944200B2May 17, 2011
Probe apparatus
TOKYO ELECTRON LTD13 citations83
US7701236B2Apr 20, 2010
Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer
TOKYO ELECTRON LTD16 citations82
US11221350B2Jan 11, 2022
Probe device for improving transfer accuracy of needle traces of probes and needle trace transcription method therefor
TOKYO ELECTRON LTD0 citations55
USD383683SSep 16, 1997
Wafer prober
TOKYO ELECTRON LTD1 citations50
US11467099B2Oct 11, 2022
Inspection apparatus
TOKYO ELECTRON LTD0 citations47
US11385260B2Jul 12, 2022
Probe card holding device and inspection device
TOKYO ELECTRON LTD0 citations47