Inventor
LIU YU-CHENG
TW50 patents
⚠️ This page may combine multiple inventors who share the name “LIU YU-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
33 patentsUS9553090B2Jan 24, 2017
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD30 citations98
US9899271B2Feb 20, 2018
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations94
US9559205B2Jan 31, 2017
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD23 citations94
US9450099B1Sep 20, 2016
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations92
US9355893B1May 31, 2016
Method for preventing extreme low-K (ELK) dielectric layer from being damaged during plasma process
TAIWAN SEMICONDUCTOR MFG CO LTD21 citations92
US10326005B2Jun 18, 2019
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US9679850B2Jun 13, 2017
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11217485B2Jan 4, 2022
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10686059B2Jun 16, 2020
Structure of semiconductor device structure having fins
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10679863B2Jun 9, 2020
Method for forming semiconductor device structure with fine line pitch and fine end-to-end space
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10008559B2Jun 26, 2018
Etching process control in forming MIM capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9595448B2Mar 14, 2017
Method for cleaning plasma processing chamber and substrate
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10002790B2Jun 19, 2018
Mechanisms for forming semiconductor device structure with feature opening
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US9425094B2Aug 23, 2016
Mechanisms for forming semiconductor device structure with feature opening
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12272595B2Apr 8, 2025
Removing polymer through treatment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11776853B2Oct 3, 2023
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11682716B2Jun 20, 2023
Structure of semiconductor device structure having fins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11217458B2Jan 4, 2022
Method for forming semiconductor device structure with fine line pitch and fine end-to-end space
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11171040B2Nov 9, 2021
Removing polymer through treatment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9735028B2Aug 15, 2017
Method for forming semiconductor device structure with fine line pitch and fine end-to-end space
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10867921B2Dec 15, 2020
Semiconductor structure with tapered conductor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10854505B2Dec 1, 2020
Removing polymer through treatment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10825892B2Nov 3, 2020
MIM capacitor with top electrode having footing profile and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10686060B2Jun 16, 2020
Structure and formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10541298B2Jan 21, 2020
Etching process control in forming MIM capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10535566B2Jan 14, 2020
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10535727B2Jan 14, 2020
Etching process control in forming MIM capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10304774B2May 28, 2019
Semiconductor structure having tapered damascene aperture and method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10020184B2Jul 10, 2018
Method for cleaning substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10014394B2Jul 3, 2018
Structure and formation method of semiconductor device with metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9892957B2Feb 13, 2018
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9842765B2Dec 12, 2017
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9812549B2Nov 7, 2017
Formation method of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
LIU YU-CHENG
2 patentsUNIVERSAL SCIENT INDUSTRIAL SHANGHAI CO LTD
2 patentsUS12567663B2Mar 3, 2026
Millimeter-wave optical fiber antenna module and method for manufacturing the same
UNIVERSAL SCIENT INDUSTRIAL SHANGHAI CO LTD0 citations51
US12506268B2Dec 23, 2025
Antenna structure, antenna array and frequency correction method of antenna structure
UNIVERSAL SCIENT INDUSTRIAL SHANGHAI CO LTD0 citations48