Inventor

HATEM CHRISTOPHER R

US23 patents

⚠️ This page may combine multiple inventors who share the name “HATEM CHRISTOPHER R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HATEM CHRISTOPHER R

VARIAN SEMICONDUCTOR EQUIPMENT

Techniques for providing ion source feed materials

Techniques for forming shallow junctions

Techniques for ion implantation of molecular ions

Optimized halo or pocket cold implants

Ethane implantation with a dilution gas

Ion implantation device with a dual pumping mode and method thereof

Techniques to mitigate straggle damage to sensitive structures

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Damage free enhancement of dopant diffusion into a substrate

Damage free enhancement of dopant diffusion into a substrate

Method and apparatus for non line-of-sight doping

Method and apparatus for non line-of-sight doping

Techniques for increased dopant activation in compound semiconductors

GODET LUDOVIC

Method and system for post-etch treatment of patterned substrate features

Techniques for forming 3D structures

Method to generate molecular ions from ions with a smaller atomic mass

Method for epitaxial layer overgrowth

HATEM CHRISTOPHER R

USJ techniques with helium-treated substrates

Low temperature ion implantation

Plasma processing of workpieces to form a coating

APPLIED MATERIALS INC

System for controlling radicals using a radical filter

Enhanced substrate amorphization using intermittent ion exposure

BATEMAN NICHOLAS P T

Self-aligned masking for solar cell manufacture

RADOVANOV SVETLANA

Method of ionization