Inventor · disambiguated record
Yoshihito Marumo
Also filed as: MARUMO YOSHIHITO
4 granted patents·176 citations·filing 1989–2008
78Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0193US5777485AProbe method and apparatus with improved probe contactTOKYO ELECTRON LTD·Filed 1996·Granted Jul 7, 1998·141 cites·8 claims
- 0261US5124931AMethod of inspecting electric characteristics of wafers and apparatus thereforTOKYO ELECTRON LTD·Filed 1989·Granted Jun 23, 1992·21 cites·9 claims
- 0359US7991219B2Method and apparatus for detecting positions of electrode padsTOKYO ELECTRON LTD·Filed 2008·Granted Aug 2, 2011·1 cites·11 claims
- 0446US5936416AProbe inspection apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Aug 10, 1999·13 cites·7 claims
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