Inventor
SONG HAN-SANG
KR38 patents
⚠️ This page may combine multiple inventors who share the name “SONG HAN-SANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYNIX SEMICONDUCTOR INC
19 patentsUS7910452B2Mar 22, 2011
Method for fabricating a cylinder-type capacitor utilizing a connected ring structure
HYNIX SEMICONDUCTOR INC325 citations99
US7835134B2Nov 16, 2010
Capacitor and method for fabricating the same
HYNIX SEMICONDUCTOR INC19 citations92
US6958301B2Oct 25, 2005
Method for forming Ta2O5 dielectric layer by using in situ N2O plasma treatment
HYNIX SEMICONDUCTOR INC29 citations92
US8017491B2Sep 13, 2011
Method for fabricating capacitor
HYNIX SEMICONDUCTOR INC7 citations84
US7772132B2Aug 10, 2010
Method for forming tetragonal zirconium oxide layer and method for fabricating capacitor having the same
HYNIX SEMICONDUCTOR INC10 citations84
US7670903B2Mar 2, 2010
Method for fabricating a cylindrical capacitor using amorphous carbon-based layer
HYNIX SEMICONDUCTOR INC10 citations84
US7616426B2Nov 10, 2009
Capacitor and method for fabricating the same
HYNIX SEMICONDUCTOR INC10 citations84
US6673668B2Jan 6, 2004
Method of forming capacitor of a semiconductor memory device
HYNIX SEMICONDUCTOR INC17 citations84
US6410381B2Jun 25, 2002
Method for forming capacitor of semiconductor device
HYNIX SEMICONDUCTOR INC17 citations83
US7361544B2Apr 22, 2008
Method for fabricating capacitor in semiconductor device
HYNIX SEMICONDUCTOR INC7 citations74
US6559000B2May 6, 2003
Method of manufacturing a capacitor in a semiconductor device
HYNIX SEMICONDUCTOR INC9 citations74
US7781336B2Aug 24, 2010
Semiconductor device including ruthenium electrode and method for fabricating the same
HYNIX SEMICONDUCTOR INC3 citations63
US7754577B2Jul 13, 2010
Method for fabricating capacitor
HYNIX SEMICONDUCTOR INC4 citations63
US6607963B2Aug 19, 2003
Method for forming capacitor of semiconductor device
HYNIX SEMICONDUCTOR INC2 citations63
US8053326B2Nov 8, 2011
Semiconductor device and method of fabricating the same
HYNIX SEMICONDUCTOR INC3 citations62
US7998825B2Aug 16, 2011
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC6 citations62
US7910428B2Mar 22, 2011
Capacitor with pillar type storage node and method for fabricating the same including conductive capping layer
HYNIX SEMICONDUCTOR INC3 citations62
US8048757B2Nov 1, 2011
Method for fabricating capacitor utilizes a sacrificial pattern enclosing the upper outer walls of the storage nodes
HYNIX SEMICONDUCTOR INC0 citations52
US8048758B2Nov 1, 2011
Method for fabricating a capacitor utilizes the sacrificial pattern covering the cell region
HYNIX SEMICONDUCTOR INC0 citations52
SK HYNIX INC
7 patentsUS8999837B2Apr 7, 2015
Semiconductor device with air gap
SK HYNIX INC21 citations92
US10395973B2Aug 27, 2019
Isolation structure and method for manufacturing the same
SK HYNIX INC5 citations84
US9865496B2Jan 9, 2018
Method for manufacturing isolation structure
SK HYNIX INC7 citations84
US9245849B2Jan 26, 2016
Semiconductor device with air gap
SK HYNIX INC9 citations83
US10256136B2Apr 9, 2019
Method of manufacturing isolation structure for semiconductor device
SK HYNIX INC2 citations73
US8822302B2Sep 2, 2014
Methods of fabricating a storage node in a semiconductor device and methods of fabricating a capacitor using the same
SK HYNIX INC3 citations62
US9214467B2Dec 15, 2015
Method for fabricating capacitor
SK HYNIX INC0 citations52
HYUNDAI ELECTRONICS IND
6 patentsUS6355516B1Mar 12, 2002
Method of manufacturing a capacitor with a bi-layer Ta2O5 capacitor dielectric in a semiconductor device including performing a plasma treatment on the first Ta2O5 layer
HYUNDAI ELECTRONICS IND11 citations74
US6326259B1Dec 4, 2001
Method of manufacturing a capacitor in a semiconductor device
HYUNDAI ELECTRONICS IND7 citations74
US6303427B1Oct 16, 2001
Method of manufacturing a capacitor in a semiconductor device
HYUNDAI ELECTRONICS IND14 citations74
US6417042B2Jul 9, 2002
Method of manufacturing a capacitor in a semiconductor device
HYUNDAI ELECTRONICS IND3 citations63
US6365487B2Apr 2, 2002
Method of manufacturing a capacitor in a semiconductor device
HYUNDAI ELECTRONICS IND2 citations63
US6281066B1Aug 28, 2001
Method of manufacturing a capacitor in a memory device
HYUNDAI ELECTRONICS IND6 citations63