Inventor
HUANG TUOCHUAN
US19 patents
⚠️ This page may combine multiple inventors who share the name “HUANG TUOCHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS7052553B1May 30, 2006
Wet cleaning of electrostatic chucks
LAM RES CORP174 citations97
US7507670B2Mar 24, 2009
Silicon electrode assembly surface decontamination by acidic solution
LAM RES CORP20 citations92
US7442114B2Oct 28, 2008
Methods for silicon electrode assembly etch rate and etch uniformity recovery
LAM RES CORP14 citations82
US9105676B2Aug 11, 2015
Method of removing damaged epoxy from electrostatic chuck
LAM RES CORP5 citations70
US7976641B1Jul 12, 2011
Extending storage time of removed plasma chamber components prior to cleaning thereof
LAM RES CORP3 citations62
US9387521B2Jul 12, 2016
Method of wet cleaning aluminum chamber parts
LAM RES CORP0 citations51
SHIH HONG
6 patentsUS8292698B1Oct 23, 2012
On-line chamber cleaning using dry ice blasting
SHIH HONG67 citations95
US9082805B2Jul 14, 2015
System and method for testing an electrostatic chuck
SHIH HONG0 citations51
US8545639B2Oct 1, 2013
Method of cleaning aluminum plasma chamber parts
SHIH HONG1 citations51
US8216388B2Jul 10, 2012
Extending storage time of removed plasma chamber components prior to cleaning thereof
SHIH HONG0 citations51
US8143904B2Mar 27, 2012
System and method for testing an electrostatic chuck
SHIH HONG1 citations51
US9054148B2Jun 9, 2015
Method for performing hot water seal on electrostatic chuck
SHIH HONG0 citations45
APPLIED MATERIALS INC
6 patentsUS12318868B2Jun 3, 2025
Texturizing a surface without bead blasting
APPLIED MATERIALS INC0 citations62
US12427550B2Sep 30, 2025
Methods for removing deposits on the surface of a chamber component
APPLIED MATERIALS INC0 citations56
US12327738B2Jun 10, 2025
Integrated semiconductor part cleaning system
APPLIED MATERIALS INC0 citations51
US10857625B2Dec 8, 2020
Texturizing a surface without bead blasting
APPLIED MATERIALS INC0 citations51
US10434604B2Oct 8, 2019
Texturizing a surface without bead blasting
APPLIED MATERIALS INC0 citations51
US11776822B2Oct 3, 2023
Wet cleaning of electrostatic chuck
APPLIED MATERIALS INC0 citations50