Inventor

BARZEN STEFAN

DE47 patents

⚠️ This page may combine multiple inventors who share the name “BARZEN STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BARZEN STEFAN

INFINEON TECHNOLOGIES AG

Sound transducer structure and method for manufacturing a sound transducer structure

Membrane and method for the production of the same

MEMS component and production method for a MEMS component

System and method for a pumping speaker

Sound transducer structure and method for manufacturing a sound transducer structure

MEMS device

System and method for a MEMS transducer

MEMS devices, interface circuits, and methods of making thereof

Method for producing a membrane

Micromechanical capacitive transducer and method for producing the same

Micromechanical capacitive transducer and method for manufacturing the same

MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer

System and method for a multi-electrode MEMS device

Sound transducer structure and method for manufacturing a sound transducer structure

Method for forming a microelectromechanical device

Microelectromechanical device and method for forming a microelectromechanical device

Capacitive microphone with insulated conductive plate

Semiconductor devices and methods of forming thereof

Semiconductor devices and methods of forming thereof

Membrane support for dual backplate transducers

Method and apparatus for manufacturing a device having a moveable structure

Sensor with a membrane electrode, a counterelectrode, and at least one spring

MEMS devices

Sound transducer structure and method for manufacturing a sound transducer structure

MEMS component and production method for a MEMS component

System and method for a pumping speaker

Semiconductor device, microphone and method for producing a semiconductor device

Membrane support for dual backplate transducers

Dual membrane transducer

Membrane support for dual backplate transducers

MEMS device

MEMS device

Sound transducer structure and method for manufacturing a sound transducer structure

Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof

System and method for a pumping speaker

MEMS device

System and method for a multi-electrode MEMS device

Semiconductor device and a method for forming a semiconductor device

Packaged MEMS device comprising adjustable ventilation opening

Thermal emitter with embedded heating element

DEHE ALFONS

MEMS structure with adjustable ventilation openings

Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions

Sound transducer structure and method for manufacturing a sound transducer structure

Tunable MEMS device and method of making a tunable MEMS device

KLEIN WOLFGANG

Micromechanical sound transducer having a membrane support with tapered surface

HERZUM CHRISTIAN

Packaged MEMS device and method of calibrating a packaged MEMS device

INFINEON TECH AG

MEMS device