P

Inventor

YOSHIOKA NOBUYUKI

JP55 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIOKA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

21 patents
US5482799AJan 9, 1996

Phase shift mask and manufacturing method thereof

MITSUBISHI ELECTRIC CORP87 citations96
US5429897AJul 4, 1995

Attenuating type phase shifting mask and method of manufacturing thereof

MITSUBISHI ELECTRIC CORP54 citations96
US6323560B1Nov 27, 2001

Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photo mask and method of exposure thereof

MITSUBISHI ELECTRIC CORP63 citations95
US5585658ADec 17, 1996

Semiconductor device having diffusion regions formed with an ion beam absorber pattern

MITSUBISHI ELECTRIC CORP36 citations92
US5464713ANov 7, 1995

Phase shift mask and method for repairing a defect of a phase shift mask

MITSUBISHI ELECTRIC CORP20 citations92
US6277205B1Aug 21, 2001

Method and apparatus for cleaning photomask

MITSUBISHI ELECTRIC CORP19 citations91
US6071376AJun 6, 2000

Method and apparatus for cleaning photomask

MITSUBISHI ELECTRIC CORP35 citations91
US6048647AApr 11, 2000

Phase shift mask of attenuation type and manufacturing method thereof

MITSUBISHI ELECTRIC CORP32 citations91
US6340543B1Jan 22, 2002

Photomask, manufacturing method thereof, and semiconductor device

MITSUBISHI ELECTRIC CORP49 citations90
US5892291AApr 6, 1999

Registration accuracy measurement mark

MITSUBISHI ELECTRIC CORP15 citations81
US4865952ASep 12, 1989

Method of forming a T-shaped control electrode through an X-ray mask

MITSUBISHI ELECTRIC CORP16 citations78
US5593801AJan 14, 1997

Attenuating type phase shifting mask, method of manufacturing thereof and semiconductor device manufactured by using the mask

MITSUBISHI ELECTRIC CORP9 citations74
US5543342AAug 6, 1996

Method of ion implantation

MITSUBISHI ELECTRIC CORP12 citations74
US5132186AJul 21, 1992

Mask for x-ray lithography and method of manufacturing the same

MITSUBISHI ELECTRIC CORP9 citations74
US5023156AJun 11, 1991

Mask for X-ray lityhography and method of manufacturing the same

MITSUBISHI ELECTRIC CORP7 citations74
US4746596AMay 24, 1988

Method for microfabrication of pattern on substrate using X-ray sensitive resist

MITSUBISHI ELECTRIC CORP7 citations74
US6068952AMay 30, 2000

Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photomask and method of exposure thereof

MITSUBISHI ELECTRIC CORP4 citations73
US5496667AMar 5, 1996

X-ray mask and its fabrication method

MITSUBISHI ELECTRIC CORP7 citations72
US4873162AOct 10, 1989

X-ray mask and a manufacture method therefor

MITSUBISHI ELECTRIC CORP16 citations69
US5644381AJul 1, 1997

Method of exposure employing phase shift mask of attenuation type

MITSUBISHI ELECTRIC CORP2 citations63
US4895779AJan 23, 1990

Method of forming a T shaped control electrode through an X-ray mask

MITSUBISHI ELECTRIC CORP3 citations59

ULVAC COATING CORP

10 patents
US5952128ASep 14, 1999

Phase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomask

ULVAC COATING CORP48 citations96
US5691090ANov 25, 1997

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

ULVAC COATING CORP38 citations96
US5474864ADec 12, 1995

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

ULVAC COATING CORP99 citations96
US5830607ANov 3, 1998

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

ULVAC COATING CORP46 citations95
US5605776AFeb 25, 1997

Phase-shifting photomask blank, phase-shifting photomask, and method of manufacturing them

ULVAC COATING CORP58 citations95
US6228541B1May 8, 2001

Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank

ULVAC COATING CORP19 citations92
US5629114AMay 13, 1997

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask comprising a semitransparent region

ULVAC COATING CORP37 citations92
US5674647AOct 7, 1997

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

ULVAC COATING CORP33 citations91
US6569577B1May 27, 2003

Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices

ULVAC COATING CORP40 citations89
US6689515B2Feb 10, 2004

Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank

ULVAC COATING CORP13 citations84

MEIDENSHA ELECTRIC MFG CO LTD

6 patents

WADA OSAMU

2 patents

RENESAS TECH CORP

2 patents

KAMOTO TAKANORI

2 patents

MITSUBISHIDENKI KABUSHIKI KAIS

1 patent

ULCOAT ULVAC COATING CORP

1 patent

IWAKIRI NORIO

1 patent

SHARP KK

1 patent

DAINIPPON INK & CHEMICALS

1 patent

YOSHIOKA NOBUYUKI

1 patent

WATANABE & CO LTD M

1 patent

Showing the top 50 of 55 patents by PatentIndex Score.