Inventor
HENDRICKSON SCOTT A
US12 patents
⚠️ This page may combine multiple inventors who share the name “HENDRICKSON SCOTT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7566891B2Jul 28, 2009
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors
APPLIED MATERIALS INC553 citations98
US7777198B2Aug 17, 2010
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
APPLIED MATERIALS INC29 citations92
US7663121B2Feb 16, 2010
High efficiency UV curing system
APPLIED MATERIALS INC38 citations92
US8657961B2Feb 25, 2014
Method for UV based silylation chamber clean
APPLIED MATERIALS INC8 citations84
US8753449B2Jun 17, 2014
Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film
APPLIED MATERIALS INC9 citations82
US10570517B2Feb 25, 2020
Apparatus and method for UV treatment, chemical treatment, and deposition
APPLIED MATERIALS INC2 citations73
US9506145B2Nov 29, 2016
Method and hardware for cleaning UV chambers
APPLIED MATERIALS INC3 citations71
US9364871B2Jun 14, 2016
Method and hardware for cleaning UV chambers
APPLIED MATERIALS INC4 citations71
US8343881B2Jan 1, 2013
Silicon dioxide layer deposited with BDEAS
APPLIED MATERIALS INC0 citations52