Inventor

CHINN JEFFREY D

US56 patents

⚠️ This page may combine multiple inventors who share the name “CHINN JEFFREY D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHINN JEFFREY D

APPLIED MATERIALS INC

Self cleaning method of forming deep trenches in silicon substrates

Methods of forming microstructure devices

Integrated method for release and passivation of MEMS structures

Method for plasma etching at a high etch rate

Method of obtaining a rounded top trench corner for semiconductor trench etch applications

Method for chemical-mechanical jet etching of semiconductor structures

Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device

Method and apparatus for chemical-mechanical jet etching of semiconductor structures

Plasma reactor with dry clean apparatus and method

Surface particle sampling head having a rotatable probe

Method of etching a deep trench having a tapered profile in silicon

Method of smoothing a trench sidewall after a deep trench silicon etch process

Two etchant etch method

Two etchant etch method

Two etchant etch method

Hydrogen-free method of plasma etching indium tin oxide

Method for controlling a profile of a structure formed on a substrate

Integrated method for release and passivation of MEMS structures

Dry etch release of MEMS structures

Method of etching organic antireflection coating (ARC) layers

Method of forming a notched silicon-containing gate structure

Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system

Method for measuring etch rates during a release process

High resist-selectivity etch for silicon trench etch applications

Method of etching variable depth features in a crystalline substrate

Etch process for etching microstructures

Construction of built-up structures on the surface of patterned masking used for polysilicon etch

Method for rounding corners and removing damaged outer surfaces of a trench

Method of etching organic ARCs in patterns having variable spacings

Storage poly process without carbon contamination

APPLIED MICROSTRUCTURES INC

Controlled vapor deposition of multilayered coatings adhered by an oxide layer

Controlled vapor deposition of biocompatible coatings over surface-treated substrates

Controlled deposition of silicon-containing coatings adhered by an oxide layer

Method for controlled application of reactive vapors to produce thin films and coatings

High aspect ratio performance coatings for biological microfluidics

Method of in-line purification of CVD reactive precursor materials

KOBRIN BORIS

Apparatus and method for controlled application of reactive vapors to produce thin films and coatings

Controlled vapor deposition of multilayered coatings adhered by an oxide layer

Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers

Controlled deposition of silicon-containing coatings adhered by an oxide layer

CHINN JEFFREY D

Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures

Surface coating process

Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures

FAIRCHILD SEMICONDUCTOR

High performance interconnect system for an integrated circuit

Method of fabricating a high performance interconnect system for an integrated circuit

FAIRCHILD CAMERA INSTR CO

High performance interconnect system for an integrated circuit

APPLIED MATERIAL INC

In situ Etching of inorganic dielectric anti-reflective coating from a substrate

INTEGRATED DEVICE TECH

Method for determining wafer cleanliness

(unassigned)

Apparatus for performing self cleaning method of forming deep trenches in silicon substrates

LOWERY MICHAEL D

Controlled vapor deposition of biocompatible coatings for medical devices