Inventor
CHO JOONYEON
US14 patents
⚠️ This page may combine multiple inventors who share the name “CHO JOONYEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YAO HUIRONG
4 patentsUS9315636B2Apr 19, 2016
Stable metal compounds, their compositions and methods
YAO HUIRONG6 citations71
US9296922B2Mar 29, 2016
Stable metal compounds as hardmasks and filling materials, their compositions and methods of use
YAO HUIRONG5 citations71
US8507192B2Aug 13, 2013
Antireflective compositions and methods of using same
YAO HUIRONG5 citations71
US9170494B2Oct 27, 2015
Antireflective compositions and methods of using same
YAO HUIRONG0 citations40
AZ ELECTRONIC MAT (LUXEMBOURG) S A R L
3 patentsUS9499698B2Nov 22, 2016
Metal hardmask composition and processes for forming fine patterns on semiconductor substrates
AZ ELECTRONIC MAT (LUXEMBOURG) S A R L5 citations70
US9409793B2Aug 9, 2016
Spin coatable metallic hard mask compositions and processes thereof
AZ ELECTRONIC MAT (LUXEMBOURG) S A R L2 citations60
US9418836B2Aug 16, 2016
Polyoxometalate and heteropolyoxometalate compositions and methods for their use
AZ ELECTRONIC MAT (LUXEMBOURG) S A R L0 citations50
RAHMAN M DALIL
2 patentsMERCK PATENT GMBH
2 patentsUS12099305B2Sep 24, 2024
Rinse and method of use thereof for removing edge protection layers and residual metal hardmask components
MERCK PATENT GMBH0 citations59
US11042091B2Jun 22, 2021
Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability
MERCK PATENT GMBH0 citations51