Inventor
MIYOSHI Nobuya
JP13 patents
Patents
13 patentsUSD900760SNov 3, 2020
Ion shield plate for semiconductor manufacturing apparatus
HITACHI HIGH TECH CORP26 citations93
USD901407SNov 10, 2020
Integrated type ion shield for semiconductor manufacturing apparatus
HITACHI HIGH TECH CORP9 citations83
US10325781B2Jun 18, 2019
Etching method and etching apparatus
HITACHI HIGH TECH CORP3 citations73
US11915951B2Feb 27, 2024
Plasma processing method
HITACHI HIGH TECH CORP1 citations62
US11557463B2Jan 17, 2023
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations62
US10937635B2Mar 2, 2021
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations62
US10872779B2Dec 22, 2020
Plasma etching method and plasma etching apparatus
HITACHI HIGH TECH CORP1 citations59
US12051574B2Jul 30, 2024
Wafer processing method and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations52
US10418254B2Sep 17, 2019
Etching method and etching apparatus
HITACHI HIGH TECH CORP0 citations52
US10290472B2May 14, 2019
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations52
US11276579B2Mar 15, 2022
Substrate processing method and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51
US10192720B2Jan 29, 2019
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations41
US10141207B2Nov 27, 2018
Operation method of plasma processing apparatus
HITACHI HIGH TECH CORP0 citations41