Inventor
SORENSEN CARL A
US32 patents
⚠️ This page may combine multiple inventors who share the name “SORENSEN CARL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS5815047ASep 29, 1998
Fast transition RF impedance matching network for plasma reactor ignition
APPLIED MATERIALS INC140 citations98
US5549756AAug 27, 1996
Optical pyrometer for a thin film deposition system
APPLIED MATERIALS INC102 citations98
US5782974AJul 21, 1998
Method of depositing a thin film using an optical pyrometer
APPLIED MATERIALS INC70 citations96
US6451390B1Sep 17, 2002
Deposition of TEOS oxide using pulsed RF plasma
APPLIED MATERIALS INC27 citations92
US9761365B2Sep 12, 2017
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
APPLIED MATERIALS INC3 citations84
US8343592B2Jan 1, 2013
Asymmetrical RF drive for electrode of plasma chamber
APPLIED MATERIALS INC13 citations84
US12362149B2Jul 15, 2025
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC1 citations74
US10304607B2May 28, 2019
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
APPLIED MATERIALS INC2 citations73
US11854771B2Dec 26, 2023
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC1 citations72
US11094508B2Aug 17, 2021
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC3 citations72
US10312475B2Jun 4, 2019
CVD thin film stress control method for display application
APPLIED MATERIALS INC3 citations72
US9818580B2Nov 14, 2017
Transmission line RF applicator for plasma chamber
APPLIED MATERIALS INC2 citations71
US10903048B2Jan 26, 2021
Substrate processing method and apparatus for controlling phase angles of harmonic signals
APPLIED MATERIALS INC2 citations69
US11532418B2Dec 20, 2022
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
APPLIED MATERIALS INC0 citations62
US10886053B2Jan 5, 2021
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
APPLIED MATERIALS INC0 citations62
US9425026B2Aug 23, 2016
Systems and methods for improved radio frequency matching networks
APPLIED MATERIALS INC1 citations52
US7570130B2Aug 4, 2009
Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber
APPLIED MATERIALS INC0 citations52
US12312689B2May 27, 2025
Large-area high-density plasma processing chamber for flat panel displays
APPLIED MATERIALS INC0 citations45
KUDELA JOZEF
4 patentsUS9397380B2Jul 19, 2016
Guided wave applicator with non-gaseous dielectric for plasma chamber
KUDELA JOZEF191 citations98
US8728586B2May 20, 2014
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
KUDELA JOZEF5 citations83
US9048518B2Jun 2, 2015
Transmission line RF applicator for plasma chamber
KUDELA JOZEF5 citations70
US8872428B2Oct 28, 2014
Plasma source with vertical gradient
KUDELA JOZEF2 citations62
SORENSEN CARL A
4 patentsUS8992723B2Mar 31, 2015
RF bus and RF return bus for plasma chamber electrode
SORENSEN CARL A157 citations97
US8691047B2Apr 8, 2014
Large area plasma processing chamber with at-electrode RF matching
SORENSEN CARL A2 citations61
US8163191B2Apr 24, 2012
Apparatus and methods for using high frequency chokes in a substrate deposition apparatus
SORENSEN CARL A1 citations51
US8075734B2Dec 13, 2011
Remote inductively coupled plasma source for CVD chamber cleaning
SORENSEN CARL A0 citations51
APPLIED KOMATSU TECHNOLOGY INC
4 patentsUS6552297B2Apr 22, 2003
RF matching network with distributed outputs
APPLIED KOMATSU TECHNOLOGY INC36 citations92
US6359250B1Mar 19, 2002
RF matching network with distributed outputs
APPLIED KOMATSU TECHNOLOGY INC37 citations92
US5977519ANov 2, 1999
Heating element with a diamond sealing material
APPLIED KOMATSU TECHNOLOGY INC18 citations90
US6191390B1Feb 20, 2001
Heating element with a diamond sealing material
APPLIED KOMATSU TECHNOLOGY INC13 citations71